● Operates as a liquid mass flow controller upon installation ofp iezoelectric actuator
● RS-485 digital interface
● LINTEC's unique ambient temperature-compensated sensor incorporated
● Highly functional upon installation of microprocessor
● Diaphragm valve with small dead volume
● High-speed and high efficiency piezoelectric actuator
● Long-term leak tightness ensured using metal seal
● By using metal case and various filters, stable operation can be achieved through reduction of radio frequency noises and electromagnetic field interferences