Fabmatics has the unique competence to offer complex automation, robotics and handling systems for the use under cleanroom conditions, from hardware and software, from consulting and development to production and installation to after sales service – all from a single source.

Each one of our products and solutions can be added and integrated seamlessly into existing production lines – always adapting to our customer’s needs. In addition, our extensive expertise enables us to design, create and implement material flow and handling automation for greenfield fabs from scratch. Hashtag

The HERO Scout is a state-of-the-art mobile robot, specifically designed for flexible transportation and secure handling of reticle pods in semiconductor manufacturing and cleanroom environments. Equipped with an innovative 6-axis cobot, the HERO Scout effortlessly manages the loading and unloading of mask load ports at different heights.

As the smallest cleanroom-compatible autonomous mobile robot on the market, it impresses with its ease of use, flexibility, and maximum reach.

Key Features & Benefits

• Compact Size: Minimal footprint enables operation in narrow aisles and fab areas.
• Long Reach: Sensitive robotic arm is ideal for loading high, ergonomically challenging positions.
• Flexible Operation: HERO Scout autonomously navigates with 3D cameras for obstacle detection and bypassing, providing both track-bound & freeroaming driving options to meet the most diverse production needs.
• Safety First: Reliable sensors ensure safe operation in environments where humans and machines work closely together.
• Fast Deployment: Short setup with SLAM and auto-teaching, minimal adjustments to production changes, and "auto-gripping" enable rapid re-engagement after maintenance, reducing downtime.
• Cleanroom Compatibility: ISO 2 certified.

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Test wafers are indispensable for semiconductor manufacturing, crucial for equipment qualification and process monitoring. They constitute up to 50% of a fab’s wafer inventory. Managing test wafer lots manually is time-consuming and prone to errors.

The Test Wafer Center (TWC) fully automates kitting and de-kitting of test wafer lots as well as their storage. Its compact and highly flexible layout allows up to 93 storage bins and up to 14 material handling locations making it the perfect solution for complex equipment qualifications scenarios.

It gives you complete (remote) control for determining timing and content of each test wafer lot & enables just-in-time delivery to your process equipment.

Featuring SECS host communication, camera-based robot routing, optional wafer aligment & identification, and various carrier identification options, the TWC ensures safe, accurate, & fully traceable material control.

Connecting to any Automated Material Handling System (conveyor or vehicle based) as well as allowing manual carrier input or output, the integration with your fab is seamless & quick.

Key Features & Benefits

Speed & Efficiency

• Commissions test & qualification lots fully automated, just-in-time and with complete traceability

• Reduces carrier transfers freeing up AMHS or manual transport capacity

Cleanliness & Material Protection

• Operates within its own ISO 3 mini environment, suitable for gray space installations & boasting a dedicated ultra-clean wafer handling area

• Detects handling errors (cross-slotting, double slotting etc.) & data inconsistencies (missing wafer, extra wafer, wrong wafer)

Space & Footprint

• Frees up expensive cleanroom space with a centralized test wafer management solution instad of numerous scattered handlings tools

• Allows layout optimization with an advanced design ideal for tight spaces, suitable even for a wall or corner installation

Resource Optimization

• Builds a complete wafer history with uninterrupted substrate tracking per SEMI E90

• Feautures automated error recovery & speeds up maintenance procedures providing best-in-class OEE via its auto-inventory function
 

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