ANCORP

ANCORP’s Multiport valve is a 1.5” high vacuum valve designed for 3-way, 4-way, or 5-way flow in demanding semiconductor and coating processes. Its modular design and configurable components enable a variety of flow patterns through the valve.

The Multiport valve consists of a cube-shaped valve body, a fully stabilized Extended Life (XL) valve stem, a fully ported ball, and end caps (body ports), all machined from corrosive-resistant 316L stainless steel. Flanged body ports or blank end caps are installed on the sides or bottom of the valve body to create a 3, 4, or 5-way valve. An L-port, T-port, or other ported ball rotates within the valve to switch flow between body ports.

FKM or FFKM O-rings seal the valve stem and end caps from atmosphere while PTFE valve seats cold flow around the ball to seal the desired body port(s) from the other body ports. The PTFE sealing surfaces are protected from direct deposition or contact with process matter, maintaining a clean, dynamic seal to prevent failure due to contamination.

Applications

The corrosive-resistant, fast-actuating design of ANCORP’s multiport valve makes it ideal for diverting, switching, combining, or splitting flow in and around reactors, traps, scrubbers, and exhaust lines on vacuum coating, etch, and abatement tools.

With a fully ported ball and minimally wetted internal components, the multiport valve resists particulate buildup and valve contamination in harsh or dirty downstream environments. 3-Way, 4-Way, and 5-way multiport valves can replace multiple 2-way valves and additional fittings on vacuum lines and manifolds.

Features and Benefits

• Patented Extended Life (XL) valve stem – stabilized stem seal eliminates atmospheric intrusion into the process line and provides high cycle life and reliable high temperature performance with FFKM O-rings
• Fully ported ball – maximum conductance with no restriction in flow path reduces particle buildup
• Evac holes on ball and blank end caps – valve interior always under vacuum, prevents virtual leaks
• Recessed fasteners and flat surfaces – improved heat transfer from heater jacket
• Faster servicing – valve stem housing can be swapped out in the field
• ISO 5211 mounting pattern – compatible with all modern valve actuators
• NAMUR VDI/VDE 3845 compliant stem detail – compatible with all modern valve position indicators

ANCORP’s high vacuum ball valves consist of a body, stem, ball, and two end caps machined from corrosive resistant 316L stainless steel. Fluoroelastomers are used to seal the stem and end caps from atmosphere while the PTFE seats cold flow around the ball to isolate the process when closed. The valve is opened and closed manually or pneumatically by ¼ turn, quick actuation. The PTFE sealing surface helps to protect it from deposition, maintaining a clean dynamic seal to prevent failure due to contamination. 

Applications

The corrosive resistant, fast actuating design of ANCORP’s vacuum ball valves makes them ideal for isolating reactors, traps, and scrubbers on vacuum process tools.

Patented Extended LIfe (XL) Technology

ANCORP’s innovative engineers have developed the Extended Life (XL) Stem Design in response to the challenges faced by leading OEMs in today’s harsh coating processes. This patented stem design extends the stem seal life of our high vacuum ball valve by 10 times compared to traditional designs. With fewer wetted components and a fully stabilized stem, the XL ball valve minimizes maintenance requirements, reduces tool downtime, and increases throughput.

ANCORP’s commitment to continuous improvement and innovation has solidified its position as a leading provider of high vacuum ball valves.

Features

• Vacuum rating of 1×10-8 torr
• Max Temp w/Standard FKM -26°C to 150°C (-15°F to 302°F)
• Higher operating temperatures are possible with alternate o-ring and grease options. Contact our sales department for more information.
• Manufactured from 316L stainless steel
• High conductance; straight through flow
• Particulate resistant ball/seat design lengthens time between maintenance cycles
• Service valve without removal from the system

ANCORP's viewport shutters play a vital role in vacuum coating and deposition applications by serving as a critical safeguard for your system viewports. These accessories are specifically designed to prevent material deposition on the viewport glass, ensuring your window remains clean throughout your process. With ANCORP vacuum viewport shutters, protecting your vacuum assembly components has never been simpler.

ANCORP also offers an extensive array of viewports tailored to various deposition needs. Utilize our comprehensive vacuum viewport selection guide to effectively match your transmission requirements with different window materials and coatings, ensuring optimal performance for your specific application.

Features

• Full closure with 100% view-diameter shielding
• Rotary motion bellows-sealed feedthrough for actuation
• 90-degree swing
• Pneumatic and manual actuation available