Best-in-class Spray Batch, Carrier Cleaning/Inspection Tools
Overview
With pioneering intellectual property and global services, SHELLBACK and its Rite Track subsidiary provide new / remanufactured equipment, upgrades and services to enable key markets such as Power Devices, Photonics & LED, MEMS & Sensors, Wireless & Analog, and Memory/Storage. Stop by and see our latest, best-in-class technology.
Our extensive wet clean & etch portfolio now includes our 2023 acquisition of MERCURY+, an industry favorite for low CoO, high throughput applications. Our TORRENT automated & semi-automated batch spray product line is the next evolution of our proprietary SEMITOOL technology up to 300mm for advanced clean, etch & strip. Reduce chemical usage & address climate initiatives with our award winning ozone TORRENT Eco-Clean.
Combine our proven SEMITOOL STORM Carrier Cleaning System and Rite Track’s popular EAGLEi FOUP/Cassette Inspection System with unparalleled accuracy to improve fab yield. As product experts on coat develop, we offer refurbished TEL Mark & ACT, DNS 80 upgrade & system solutions to suit your needs. We also provide solutions for Rite Track’s SVG 8X/9X coat develop systems as well as P5000 CVD / Etch as the product line owner.