Engineered for features < 100 um and down to 20 um and creates stage clearance for fixtures up to 100 mm tall. Sample size can be up to 600 mm x 600 mm for full XY stage coverage. Provides the best all-around performance and versatility with the smallest spot size, highest precision stage and largest sample capabilities. A Series instruments include 7.5 um optics with molybdenum anode tube and high resolution, large-window silicon drift detector.