Loading...

Agileo Automation

POITIERS,  France
https://www.agileo.com
  • Booth: 973

For All Your Control & Connectivity Solutions!

Overview

Agileo Automation provides control and connectivity solutions for semiconductor equipment manufacturers

Our customers are mainly Original Equipment Manufacturers of production machines that equip the factories of semiconductor and precision electronics companies worldwide. We provide SECS/GEM and GEM300 licensed libraries, internal equipment control libraries and cost-competitive integration services to a global installed base.

Experts in the semiconductor industry, Agileo Automation supports our customers from the design and internal control of their machines to connection to the IT systems for production control in factories all over the world.

We develop software modules that are integrated by our teams and/or those of our customers on production machines.

Agileo understands the issues faced by semiconductor equipment manufacturers and instills this mindset throughout the company by:

- Understanding the purpose of the machine and its hardware architecture
- Working with end customers (Tool owner and IT team)
- Bringing the machine into production within the agreed deadlines
- Prioritizing the support of software and technicians in the field


  Press Releases

  • Soitec: Benefits of the Digital Twin for Equipment Integration

    To prepare for the integration of a new automated SOI wafer loading robot into its production lines based in Bernin, France and Singapore, Soitec has relied upon Agileo Automation’s digital twin and SECS/GEM connectivity solution. The company had three key objectives:

    • Eliminate the workload associated with the development of an in-house simulator,
    • Create a comprehensive work environment to allow the completion of multiple tests without interrupting production,
    • Benefit from an interface based on the same software as the wafer loading robot control system to faithfully emulate its motions.

    Let’s take a look back at this collaboration with the testimonial of Soitec IT Architect Dany Adolphe who managed the project.


  Products

  • Agil'GEM
    Agil'GEM is a SECS/GEM and PV2 Software library for semiconductor, electronics and photovoltaic production equipment connectivity....

  • Agil'GEM is a SECS/GEM and PV2 Software library for semiconductor, electronics and photovoltaic production equipment connectivity.
    GEM services:

    •     Equipment communication state and control state
    •     Process program
    •     Collection event sending
    •     Variable data collection
    •     Status data collection
    •     Remote control
    •     Alarm management
    •     Equipment constants
    •     Equipment Terminal Services
    •     Clock
    •     Trace data collection
    •     Limits monitoring

    SEMI standards:

    •     SEMI E4 SECS-I (serial protocol)
    •     SEMI E37.1 HSMS-SS (ethernet protocol)
    •     SEMI E5 SECS-II (message format)
    •     SEMI E30 GEM

    The Agil'GEM library can be integrated directly in Agileo Automation Equipment Controller Framework or in a third party Equipment Controller software through its COM/DCOM or .NET interfaces. The following languages can be used to integrate it C#, VB.Net, Pascal (Delphi), C++.

    Open sources integration samples can be provided with the SDK (Software Development Kit) for C#, VB.Net, Pascal and C++. Below, a screenshot of the the C# integration sample.

    An interface for PLCs is possible with the GEM4PLC architecture, which allows gateways with specific protocols such as Modbus or OPC-UA. The use of a third party OPC-DA server allows the implementation of gateways with almost all PLC brands on the market, including: Allen-Bradley, B&R, Beckhoff, CoDeSys, Fanuc, Hilscher, Honeywell, InTouch Client, Mitsubishi, Omron FINS, Siemens S5 and S7, Wago, Yaskawa, Yokogawa, etc.

    Integration support

    Beyond technical integration details, Agileo Automation helps its customers to understand GEM standard to adapt it to a given equipment thanks to a structured approach starting with a good understanding of the equipment

    Agil'GEM comes with a free manual version of Speech Scenario, our host simulator software for testing.

  • Agil'GEM300
    Extended connectivity for GEM300 automation...

  • Agil'GEM300 is a complete .NET/C# solution for GEM300 connectivity. It handles the complexity of GEM300 automation and provides a simple interface to connect a semiconductor equipment controller application to the factory host.

    GEM300 services:

    • Management of Carriers and Load Ports
      • Carrier ID Verification
      • Slot Map Verification
      • Both manually and through OHT 
    • Management of Process Jobs
    • Management of Control Jobs 
    • Tracking substrates in the equipment with Substrate ID verification 
    • Tracking of Equipment Performance 
    • Management of Module Performance 
    • Collaboration between standards managed by Agil’GEM300 with minimal integrator interaction 
    • Includes Agil'GEM 

    SEMI standards :

    SEMI standards supported in Agil'GEM300:

    • SEMI E-87 - Carrier Management
      • Fixed buffer
      • Internal buffer 
    • SEMI E-40 - Processing Managment 
    • SEMI E-94 - Control Job Management 
      • Material redirection
    • SEMI E-90 - Substrate Tracking
      • Single substrate tracking 
      • Batch tracking 
    • SEMI E-116 - Equipment Performance Tracking
    • SEMI E-157 - Module Process Tracking 
    • SEMI E-39 - Object Services 
    • SEMI E-30 - GEM​​​​​​
    • SEMI E4 - SECS-I (serial protocol)
    • SEMI E37.1 - HSMS-SS (ethernet protocol)
    • SEMI E5 - SECS-II (message format)
  • A²ECF Semi - Your tool operating system
    A²ECF SEMI is a software framework for the control of process or metrology equipment including the management of a robotic loading platform (EFEM, Equipment Front End Module)....

  • A²ECF Semi is a software framework for process or metrology equipment control including EFEM (robotics loading platform) management.

    A²ECF Semi is intended for equipment manufacturers in the semiconductorelectronics or photovoltaic industries.

    Higly customizable, this SEMI E95 compliant framework proposes a standardized way to present user interface for semiconductor applications:

    • Multiuser management with access rights (operator, process engineer, field service engineer for example)
    • Automatic trace generation with tools to analyze equipment activity
    • Operator actions recording
    • EFEM devices management such as (contact us for list of supported devices):
      • Wafer handlers with one or dual arms
      • Pre-aligners
      • Load Ports and FOUP Openers
      • Scribe readers
    • Schedulers for wafer flow sequencing
    • Data collection to the Fab Host and Remote control through SECS/GEM and PV2 interface library Agil'GEM or GEM300 (GEM + 300mm automation standards including in particular Carrier Management, Process Job, Control Job and Substrate Tracking through the integration of CIM300 from Cimetrix)

    Integration:

    A²ECF SEMI can be integrated either by your team after training, or by Agileo Automation team, or both.

    Most of the time when we take care of the development, we create the first application based on the basis of specifications that we can write together during a consulting phase. In this case, we are able to commit to a budget and a timeframe up to the tool acceptance at your customer's site, including SECS/GEM connectivity. Developments are carried out using our methodology in order to ensure the expected quality and meet deadlines.


Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".