Overview
RI Research Instruments offers system & component developments,solutions with XUV and EUV photons for nanoscopy, nanolytics and EUV lithography infrastructure We supply stand-alone tools to leading semiconductor companies and research labs, supporting activities from soft X-ray investigations to EUV. Our portfolio includes applications for solar research, photochemistry, photolithography and customized DPP, LPP sources for XUV, EUV, and soft X rays. Our fabrication facilities are fully equipped with an extensive range of tools, state of the art machinery, dedicated clean rooms, advanced cleanliness and measurement laboratories, and comprehensive production capabilities, all managed in house.
Products & Services:
- EUV-Sources
- Mask Blank Reflectometers
- Pellicle Reflection & Transmission Tools
- EUV Resist Exposer
- XUV Spectrophotometer
- Pulsed Power Systems
- Particle Accelerators
- Custom developments
- Customized Semi Tools
- System & Subsystem manufacturing
- Cleanroom Assembly & Services