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Vital Materials Co., Ltd

Cupertino,  CA 
United States
http://www.vitalchem.com
  • Booth: 151

Welcome to the booth of Vital Materials - FHR & VTFM

Overview

Vital’s advancing thin film technology ensures your solutions for vacuum coating, sputtering targets and evaporation materials

FHR and Vital Thin Film Materials - two companies dedicated to advancing thin film technology. FHR Anlagenbau GmbH, a part of the VITAL Group, manufactures vacuum coating systems for both R&D and production.  FHR designs, manufactures and replicates coating systems for a diverse range of applications including thin film solar panels, GaAs, heterojunction and tandem solar cells. Other applications include displays, automobiles, MEMS sensors, optics, and decoration. FHR products include FHR.Roll, FHR.Line, FHR.Star, and FHR.Boxx series.

Looking to the future, FHR and VTFM are both committed to continuing to invest in research and development, expanding their product lines, and developing new and innovative solutions to meet the evolving needs of their customers. Whether you're in the market for vacuum coating equipment or high-quality sputtering targets and evaporation materials, FHR and VTFM have the expertise, experience, and innovation needed to deliver outstanding results.


  Products

  • AI Target
    Aluminum (AI) target that is widely used in semiconductor, TFT-LCD, and decorative coatings....

  • Symbol : Al
    Purity : 4N+
    Form : Planar; Rotary
    Color / Appearance : Silvery white, metallic
    Typical Density : 2.67g/cm³  
    Typical Dimension : Planar: D500mm
    Rotary: L4000mm
    Other dimensions available

  • ITO Target
    Indium Tin Oxide (ITO) can be used for depositing thin conductive transparent layers through sputtering or evaporation, and is widely used as electrode material in TFT-LCD, LED, OLED, touch panel, smart glass, and solar cells....

  • Symbol : ITO
    Typical Composition : In2O3/SnO2: 90/10wt%
    Other compositions available
    Purity : 4N+
    Form : Planar; Rotary
    Color / Appearance : Black grey
    Typical Density : 7.13g/cm³
    Typical Dimension : Planar: L300-1500mm for single segment
    Rotary: L300-900mm for single segment
    Other dimensions available
  • AISc Target
    Aluminum Scandium (AlSc) target is mainly used in semiconductor, integrated circuits and micro motors....

  • Symbol : AlSc
    Composition : Al 9.6at%Sc; Al 20at%Sc; Al 30at%Sc
    Other compositions available
    Purity : 3N5+
    Form : Planar
    Color /  Appearance : Grey, solid
    Typical Density : >2.92g/cm³
    Typical Dimension : Φ332mm
    Other dimensions available

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