Denton Vacuum

Moorestown,  NJ 
United States
http://www.dentonvacuum.com

• Booth: 6759

See how our systems enhance semiconductor manufacturing.

Overview

Denton Vacuum is celebrating its 60th anniversary! With 6 decades of innovation in vacuum deposition and etch technologies, we are excited to share our breakthroughs in plasma ion beam technology. Our deposition and etch systems are built on standard platforms for any production level, from pilot production to high-volume manufacturing. We partner with clients to understand their application process and develop a system configuration that is specific to their needs. This helps manufacturers realize lower overall cost of ownership and better ROI.

Denton provides production-proven systems for a diverse range of applications, including:

• Lasers

• IR Detectors

• Flexible Displays

• Failure Analysis

• Delayering

• Precision Optics

• Semiconductor

• Compound Semi

  Press Releases

• Denton Vacuum Announces New Order for Second Infinity Biased Target Ion Beam Deposition System (Apr 11, 2024)

  MOORESTOWN, NJ, May 2, 2023 – Denton Vacuum LLC announces it has won a new system order for semiconductor laser facet coating from a leading laser manufacturer. The system utilizes Denton’s patented bias target technology. This is the second laser manufacturer to switch to Denton’s patented bias target sputtering for laser facet coating in the past year.

  Dr. David Douglass, Vice President of Marketing and Technology at Denton Vacuum, commented, “Denton’s bias target technology has been demonstrated to deposit uniquely low contamination films, and ion beam sputtering provides the lowest defect density. These two capabilities combine to provide the purest, lowest defect films which lead to higher laser damage threshold. This allows our customers to extract more power from individual laser diodes and lower their cost per watt.”

  Frank Cumbo, President and CEO of Denton Vacuum, added, “We are pleased to see market penetration for bias target sputtering. In addition to laser facet coating, we are seeing opportunities to expand into new markets and applications such as ultrathin barriers, low resistivity contacts, and low energy etch for high performance computing. Bias target sputtering also provides a tremendous advantage for meeting the ultra-low defect density requirement of EUV mask blanks.”

  The Infinity Biased Target Ion Beam Deposition system boasts low operating pressure and low ion energy which makes the sputter module an ideal solution for next-generation high TCR focal plane arrays and laser bar facet coatings. It is fully compatible with Denton’s Versa Cluster platform to maximize throughput and process efficiency.

  For more information, contact Dr. Douglass at [email protected].

  About Denton Vacuum LLC

  Denton Vacuum empowers the optoelectronic and semiconductor markets, helping engineers optimize processes and solve production challenges while improving manufacturing yields and gaining efficiency and throughput. Denton’s continuous commitment to research and development of thin film technology, including its proprietary integrated diagnostic systems, enables predictable, repeatable performance in a wide process window. Denton’s breadth of technologies and market focus pave the way in advancing such diverse applications as electron microscopy and microanalyses to providing market-leading solutions for IR detectors, semiconductor lasers and precision optics.

  Contact information:

  Visit Denton at www.dentonvacuum.com or call toll free 1-800-666-6004.

  Find out latest Press Release on Seeking Alpha.

• Denton Vacuum Announces Third Order for Infinity FA Ion Beam Etch Delayering System (Apr 11, 2024)

  Moorestown, NJ, February 10, 2023 — Denton Vacuum LLC announced today that they have won a third order for the Infinity FA failure analysis system from a leading global semiconductor memory device manufacturer. The Infinity FA is an ion beam etch chip delayering system for semiconductor failure analysis and quality assurance. This third system will be placed at a second manufacturing location as the process and technology has been validated in their R&D center.

  Frank Cumbo, President and CEO of Denton Vacuum, commented, “This third system order shows our customer is realizing the benefit of pushing higher capability FA techniques out of the lab and into the fab. This is enabling faster defect identification and next generation device optimization. The low ion energy is particularly important for advanced chips based on 7nm or less processes. High ion energies like those in focused ion beam and other ion beam technologies will damage the features of interest, preventing proper failure analysis.”

  Dr. David Douglass, Senior Product Manager at Denton Vacuum, added, “Denton’s low ion energy, broad beam etch capability uniquely enables large area, rapid processing of semiconductor devices. Traditionally, this is a very slow, iterative process requiring highly skilled operators and multiple delayering techniques. The Infinity FA is able to rapidly etch highly uniform, planar, large areas of interest. The integrated Secondary Ion Mass Spectrometer (SIMS) enables precision end pointing at each layer.”

  For more information, contact Dr. Douglass at [email protected]

  About Denton Vacuum LLC

  Denton Vacuum empowers the optoelectronic and semiconductor markets, helping engineers optimize processes and solve production challenges while improving manufacturing yields and gaining efficiency and throughput. Denton’s continuous commitment to research and development of thin film technology, including its proprietary integrated diagnostic systems, enables predictable, repeatable performance in a wide process window. Denton’s breadth of technologies and market focus pave the way in advancing such diverse applications as electron microscopy and microanalyses to providing market-leading solutions for IR detectors, semiconductor lasers and precision optics.

  Contact information:

  Visit Denton at www.dentonvacuum.com or call toll free 1-800-666-6004.

  Find our latest Press Release on Seeking Alpha.

• Denton Vacuum Receives Phoenix Order for Green Energy (Apr 11, 2024)

  MOORESTOWN, NJ, August 30, 2023 – Denton Vacuum LLC, a leading provider of thin film deposition and etch systems, announced its recent order for the highly acclaimed Phoenix system, designed for high-volume manufacturing of large area substrates used for green energy, display and semiconductor applications. The order comes from a well-known renewable energy company looking to advance the sustainable energy sector using thin film magnetron sputtering technology.

  The Phoenix system is recognized for its cutting-edge technology and superior performance in depositing thin films with exceptional precision, uniformity and repeatability at high production volumes. These critical features align perfectly with the green energy application’s requirements, allowing for the production of advanced, efficient, and environmentally friendly energy solutions.

  Additionally, the Phoenix system’s versatility extends to Denton’s revolutionary PIB-CVD (Plasma Ion Beam — Chemical Vapor Deposition) applications. PIB-CVD is a groundbreaking technology that allows for the deposition of high-quality thin films with unique functional properties, making it ideal for applications in consumer displays, optics and semiconductors.

  “We are excited to be chosen by this prominent renewable energy company to provide our high-volume production Phoenix system to drive down costs of green energy applications,” said Dr. David Douglass, VP Marketing and Technology at Denton Vacuum. “Our commitment to driving sustainable solutions aligns perfectly with the objectives of our customers in supporting the renewable energy sector.”

  Frank Cumbo, President and CEO of Denton Vacuum, added that “the confidential green energy application, combined with the exploration of PIB-CVD technology, highlights Denton Vacuum’s dedication to pushing the boundaries of innovation and sustainability. By collaborating with industry leaders in green energy, consumer display and semiconductor research, the company aims to make a significant impact on global environmental challenges and technological advancements such as sensors on displays.”

  For more information, contact Dr. Douglass at [email protected].

  About Denton Vacuum LLC

  Denton Vacuum empowers the optoelectronic and semiconductor markets, helping engineers optimize processes and solve production challenges while improving manufacturing yields and gaining efficiency and throughput. Denton’s continuous commitment to research and development of thin film technology, including its proprietary integrated diagnostic systems, enables predictable, repeatable performance in a wide process window. Denton’s breadth of technologies and market focus pave the way in advancing such diverse applications as electron microscopy and microanalysis to providing market-leading solutions for IR detectors, semiconductor lasers and precision optics.

  Contact information:

  Visit Denton at www.dentonvacuum.com or call toll free 1-800-666-6004.

  Find our latest Press Release on MarketWatch.