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Servomex, Inc.

Woburn,  MA 
United States
http://www.servomex.com
  • Booth: 1652

Overview

Servomex has set the standard for gas analysis in the semiconductor market for many years, pioneering the monitoring technologies and ground-breaking systems solutions that deliver accurate sensitivity, unparalleled performance and reduced cost of ownership.

 

It offers the most extensive range of analyzer technologies available from a single gas analysis manufacturer, ensuring delivery of the precise, correct solution for every point in your process. 

 

Leading the field in measurement sensitivity, Servomex offers accurate, stable monitoring from percent levels down to the very lowest ultra-trace levels demanded by the semiconductor market. When these exceptional technology range and measurement capabilities are combined, Servomex is unique in offering a genuine ‘all of market’ solution to the Industry.


  Products

  • SERVOPRO NanoTrace DF-560E ULTRA
    Measures ultra-trace O2 to the lowest levels...

  • Designed to measure ultra-trace O2 to the ultra-low ppt levels demanded by the semiconductor sector, the DF-560E ULTRA delivers an industry-leading 45ppt LDL. 

  • SERVOPRO NanoTrace DF-750
    Trace/ultra-trace moisture measurements for continuous quality control (CQC) in semiconductor fabs tunable diode laser absorption spectroscopy (TDLAS)....

  • Designed specifically to make 100 ppt ultra-trace moisture measurements in UHP nitrogen, hydrogen, helium, argon, and oxygen. The DF-750 is optimized for CQC of all bulk gases necessary to operate 300mm semiconductor fabs. The same robust TDLAS Herriot Cell used by NASA provides our customers with reduced maintenance, keeping cost-of-ownership low. It also increases uptime with exceptional zero-drift stability thereby extending calibration intervals lowering cost-of-ownership.
  • SERVOPRO NanoChrome ULTRA
    The number one choice for ultra-trace purity measurements in the semiconductor industry....

  • Delivering superior ultra-trace measurements of UHP gases in a wide range of background gases, the revolutionary NanoChrome ULTRA incorporates the latest advances in sensing and signal processing methodology, for exceptional performance. New look coming 2025.

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