Durex Industries

Cary,  IL 
United States
https://www.durexindustries.com
  • Booth: 1371

Welcome! We look forward to speaking with you.

Overview

Durex Industries is the premier, vertically integrated, designer and manufacturer of heat / chill assemblies, line heating solutions, and specialty parts for Semiconductor Equipment Manufacturers.

Thermal Solutions - Heating and Cooling are Everywhere! 

  • Cast AL, Machined & Brazed AL, and Brazed or E-Beam Welded SS Heat / Chill Pedestals
  • Specialty Heated / Chilled Chamber Rings, Lids, Liners
  • Gas Manifolds, Mixing Chambers and Showerhead Components
  • Sentinel® Low-Outgas Gas & Pump Line Heaters
  • Gas Panel Heater
  • Cable, Cartridge, Tubular, Mica, Kapton, Silicone Rubber Heater Elements

Non-Thermal Solutions - We Can Help with That Too!

  • Formed, Shaped, Machined Metallic and Shielded Assemblies
  • Control Solutions
  • RF Delivery

New Product Development (NPD) Team  - Fast Time-to-Market with Low-Risk!

  • Fast Quotations
  • Collaborative Engineering and Manufacturing Development
  • FEA/CFD Thermal Modeling
  • Quick Turn Prototype Builds

  Products

  • Cast Heaters
    Electric cast heaters and assemblies for semiconductor processing....

    • Hot Chucks, Heat/Chill Platens & Pedestals, Cast Vacuum Chamber Heaters, Heat/Chill Gas Mix Chambers & Manifolds, RF Delivery Assemblies, and Showerhead & ION Implantation Components.
  • Temperature Sensors
    Engineered thermocouple, RTD and thermistor probes as well as sensor assembly solutions for applications to 1000C....

    • Product Features:

    • Single or multipoint sensor assemblies
    • NIST traceable calibration on refractory thermocouple materials
    • 100, 1000, and 2000 Ω RTD assemblies

    A wide variety of calibrations, sheath materials, fittings, connectors, etc. are available.

  • Gas & Pump Line Heaters
    Silicone insulated heaters and cast circulation heaters....

    • Heaters and insulation systems are a turnkey thermal solution for PECVD, LPCVD, MOCVD, ALD, plasma etch and other vacuum applications. Solutions such as, low outgas line heaters, coil-to-length line heaters & gas panel heaters.

Categories

200 Packaging and Assembly Equipment
  • Die Bonding; Attach Equipment
  • Solder Reflow; Soldering & Brazing Equipment
  • Wire Bonding Equipment
    • 202 Other Equipment
  • Molding; Encapsulation; Decapsulation Equipment
    • 203 Inspection & Measurement Products
  • Instruments; Bench Top Test
  • Thermal Sensing, Measurement, Analysis
    • 206 PV Equipment
  • Thin Film
    • 207 Process Equipment
  • Cleaning; Washing Equipment for Assembly & Packaging
  • Deposition; (CVD, PVD, ALD, Plating)
  • Deposition; PVD; Sputtering; Evaporation Equipment
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Thermal Processing
    • 208 Test Equipment
  • Handlers; Positioner Systems
    • 300 Packaging and Assembly Materials
  • Bonding; Interconnect: Wire/Ribbon/Tape/Capillaries/Tools
    • 400 Components, Parts & Accessories
  • Chucks for Wafer and other Substrates
  • Electronic Hardware; Fixtures and Supplies
  • Enclosures; Cabinets
  • Heating elements and other Furnace components
  • Sensors
    • 401 Sub-systems
  • Gas; Liquid delivery panels as subsystems
  • Temp. Sensing; Control; Recirculators; Chillers; Heat Exch.
    • 402 PV Systems
  • Measurement and Control Technology
    • 500 Factory Monitoring & Control Systems (FMCS)
  • Gas Handling - Cabinets; Control; Supply Systems
  • Process Controls
    • 700 Manufacturing Services
  • Machine Shop; Fabrication Service
  • Repair; Rebuild; Install Equipment; Maintenance Svcs; Spares
    • 701 Manufacturing Services or Consulting
  • Equip; Hardware; Product Design, Integration and Mfg.

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