Better Products for Better Yield!
Overview
Levitronix® markets pumps, flowmeters, flow control systems, mixers, viscometers and fans to the Semiconductor Industry. Levitronix® pumping systems use a revolutionary magnetic levitation technology, which allows for contact-free, and thus, particle-free operation. With no mechanical wear, Levitronix® pumps are ideal for CMP slurry handling, metal plating processes, wet cleaning and etching, and high purity fluid transfer and delivery. Levitronix® pumps deliver continuous flow allowing for precise electronic control of flow and pressure.
The Levitronix® pumping systems are designed for high-purity fluid applications where extremely low particle shedding and metal contamination are required. Tests conducted by an independent laboratory prove that particle generation from a Levitronix® pump is significantly less than that from diaphragm pumps. Comparative tests among Levitronix®, bellows and diaphragm pumps, conducted with CMP slurries, showed the Levitronix® pumps producing 200-1,000 times fewer large particles which can scratch and damage wafers.