Shanghai Jheat Technology Co., Ltd.

TC-Wafer Temperature  Measuring System

Overview

The TC-Wafer Temperature Measuring System is designed to collect temperature data from the environment of process equipment. The system comprises the TC-Wafer unit and computer testing software. It features channels ranging from 1 to 34, capable of measuring a broad spectrum of temperatures. The system ensures real-time transmission of collected data, communicating with the computer via wired modes such as RS485, USB, or Ethernet. It also includes functions for data collection, storage, analysis, curve drawing, and cloud mapping.

Features

a.The collection channels range from 1 to 34; 

b.The temperature measurement range is wide, from 0℃ to 1100℃ ;

c.Diverse communication methods,  such as RS485, USB, or Ethernet;

d.For further analysis of temperature  data, curves and cloud maps  can be drawn.

In-situ Scanner Temp System

Overview 

In-situ Scanner Temp System supports monitoring of dry, immersion and EUV lithography scanners.  In-situ Scanner Temp System produces high accuracy temporal and spatial wafer temperature data  that can assist lithography engineers monitor scanner thermal variations that affect pattern overlay  performance. With a standard-thickness(12 inches) wafer format, this system can be used to monitor  lithography thermal uniformity and stability with high precision and low noise, enabling scanner  qualification and matching.

Features

a.High accuracy, flexible application, fast measurement;

b.Scanning speed up to 4Hz, temperature accuracy up to 10mK;

c.Point-to-point wireless communication.