The MWZ Profiler is a routine semicondustor inspection microscope with motorized components for nosepiece, iris diaphragm, X/Y stage, and Z drive. Measurement range is in a range from low-Angstrom to millimeters.
The instrument utilizes structured illumination combined with a "shapes by shading" algorithm to deliver widefield Z profile results. Multiple area or line scans can be deployed on a single image to deliver a robust data set. 3D models can be viewed at any angle; videos can be captured of this 3D model view. The system incorporates a simple user interface with a 4 tab workflow, allowing operator-level personnel to obtain full engineering-level data. A single "button press" generates technical data which is easily exported to Excel for further manipulation, or inserted into a report template.
The combination of widefield imaging (5-10mm FOV) coupled with Angstrom-level resolution contributes to much higher throughput as compared to either AFM, Interferometers, or SEM. This 3D instrument provides high-level metrology for semiconductors, microelectronics, PCBs and medical devices.