Semiconductor Wet Process Specialist & Custom Equipment
Overview
Modutek, established in 1980 provides a full line of batch processing equipment, including etching, clean, precision clean, chemical spiking, chemical delivery, waste handling, air scrubbers acid neutralizers & process components.
Modutek’s broad portfolio of products caters to the needs of Semiconductor Fab Infrastructure development and is also well known for its high quality wet process equipment. Few customized products from Modutek’s portfolio are:
• Broad-based Product Line - All wet processing components. Polypropylene, PVDF, quartz, Teflon and stainless steel based process components, either in a static mode or with recirculation
• Chemical Delivery, Chemical Waste Handling System – with CCB, CDU, VMB and Control
• Neutralization, Air Scrubbers and Wastewater Treatment System
• Process Stations – Manual, Semi-Auto, and Fully Automated. Etching, cleaning, plating, and solvent stations
• Megasonic Technology
• Precision Parts Cleaning – Designed for high-capacity payloads with automation handling
• IPA Vapor – Gradient type IPA Vapor dryer (Marangoni)
• Etch Bath Technology
• Rinse Bath Technology
• Quartz Bath
• Chiller
• Vaccuum Etch