Full reclaim services for all diameters of Si wafers
- Separate chemical strip lines for metal and dielectric films strip capabilities
- CMP tools restore the wafers single side or double side polished surfaces
- RCA line, inspection area, metrology tool, and bagging area all within a class 100 cleanroom
Specialized strip & clean services for all diameters of Si wafers
- Isolated baths with fresh chemistries
Specialized clean services for most alternative wafers