Overview
Established in 1994, BOBOO HITECH has been manufacturing core equipment components used in both the Front End of Line & Back End of Line semiconductor fabrication with over 30 years of experience. Based on technical expertise, we supply a diverse range of components, such as Heaters, Electrostatic Chucks(ESC), and Heating Jackets, using all materials related to Metals, Ceramics, and Polymers.
[Our business]
- Wafer Heaters
- Wafer Chucks
- Metal Heaters
- Ceramic Heaters
- Electrostatic Chucks(ESC)
- Advanced Packaging Heaters
- Line Heaters and Insulators
- Heating Jackets