SICO Technology GmbH

Bad Bleiberg,  Austria
http://www.sico-tec.com
  • Booth: 1161

Silicon, quartz & ceramics for semiconductor industry

Overview

SICO was founded in 1981 and specializes in the production of high-purity silicon, quartz glass, and ceramics for the semiconductor industry.
As an ISO 9001:2015 certified company, SICO manufactures complete furnace parts for various OEM furnace brands. We are experts in producing high-purity silicon carriers, injectors, liners, tubes etc. for e.g. front-end LPCVD & high-temperature processes, as well as in the refurbishment, cleaning, and repair of components for the semiconductor industry. The SICO Global Group is represented in the USA, Europe, and Asia.


  Products

  • Carrier, Boat
    - Vertical and Horizontal Silicon-Carriers - all wafer sizes up to 300mm - all OEM - customisation - usable for processes like LPCVD Poly-Si, SiN - various high temperature applications, like Oxyde, Annealing up to 1300°C...

  • Sico silicon products are the first choice for use in semiconductor poly, nitride and CVD processes.

    High purity semiconductor grade silicon is the raw material for wafers.
    Sico machines extremly high pure silicon for silicon process tubes, injectors, pedestals and carrierboats.

    The materials high temperature capability and the same thermal expansion coefficient as the wafers, helps the customer to reduce particle defects and slips.
    Sico can machine silicon and form it into shapes, only known from quartz until now.


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