WaveRunIR™-DRE is the industry’s first fully automated FTIR-based system for measuring and reporting Destruction or Removal Efficiency (DRE) of fluorinated greenhouse gases in semiconductor manufacturing. Designed for POU abatement systems in etch and deposition processes, it features dual FTIR spectrometers, a software-controlled gas manifold with six inlets, onboard tracer calibration, programmable mass flow controllers, and real-time dashboards. Data is displayed instantly on secure cloud or LAN platforms, enabling rapid decision-making and streamlined EPA-compliant reporting. With mobile cart portability, integrated service indicators, and automated calibration, WaveRunIR-DRE transforms how fabs monitor GHG abatement efficiency. Visit our
booth #366 for a live demo and see how to make your compliance program faster, smarter, and more reliable.