Greetings from Advanced Spectral Technology, Inc.
Overview
Advanced Spectral Technology (AST) delivers industry-leading inspection and metrology solutions for critical process control. Imaging technology spans visible, infrared (NIR, SWIR, MWIR), and UV spectrums. Applications include defect detection, critical dimension (CD), overlay metrology, wafer thickness (TTV), etch depth (trench, TSVs, TGVs), and wafer shape. Our high-precision systems are designed & manufactured to achieve optimum performance and reliability in production and lab environments. Integrated EFEM options support all wafer sizes (100, 150, 200, & 300mm) and load-port formats.