Chemical Analyzers and Wafer Temperature Monitoring Systems
Overview
CI Semi, a division of CI Systems Ltd, develops, manufactures and markets process monitoring and control systems for the semiconductor, solar PV, LED and FPD markets to OEM toolmakers and end uesrs, alike.
CI’s family of wet process analyzers (WetSpec line) offers cost effective solutions for in-line wet chemistry monitoring. These range from conductivity and NDIR solutions for concentration measurement of simple chemistries, to spectroscopic systems for measuring multiple constituents and residues in complex solutions.
WetAlyzer, the newest CI Semi wet process analyzer is a Next Gen High Precision, Full Stack On-Line Analyzer, optimized for advanced cleaning/etching applications. Typical applications: PERR and PAC,
W Contact PERR, Hard Mask Opening, PRS, ESL, Poly Etch for Memory (DSP+), Selective Nitride Etch (Hot Phos), Metal Etch and other Commodity and Formulated Chemistries.
CI's line of noncontact temperature monitors (the NTM line) incorporates real-time, same point emissivity measurement and compensation, making them the ideal solution for in situ process monitoring.