The CT Series combines high-accuracy and flexibility in metrology, offering single- and multi-sensor configurations with nanometer resolution. It delivers advanced measurement performance while adapting to a wide variety of applications.
A range of system sizes is available, from compact table-top models to versions with scanning areas of up to 650 × 650 mm² for large panels. One system can be equipped with up to six different sensor technologies, providing a broad range of measurement options. Its adaptable design allows configuration for specific needs, such as conveyor belt or handler connection, custom interfaces, vacuum chucks and more.
Specialized configurations such as the industry-standard CT300 and CT350 are widely used for substrates, JEDEC trays, boats, wafers up to 12", and other components within the system size. Double-sided models allow simultaneous measurement of top and bottom surfaces, delivering absolute thickness values in a single scan.
For maximum efficiency, measurement processes can be fully automated, enabling consistent results and high throughput without operator intervention and SECS/GEM capability.