| Pressure range at 20°C1) |
Blank aluminum |
1 × 10E-8 mbar to 1.2 bar (abs)
1 × 10E-6 mbar to 1.2 bar (abs) |
| Hard anodized aluminum |
| Leak rate to outside at 20°C1) |
Valve body : |
Blank aluminum |
1 × 10E-9 mbar l/s |
| Hard anodized aluminum |
1 × 10E-5 mbar l/s |
| Valve Seat : |
Blank aluminum |
1 × 10E-9 mbar l/s |
| Hard anodized aluminum |
1 × 10E-4 mbar l/s |
| Cycles until first service1) |
Pressure control |
1 million |
| Closing / opening |
200,000 (unheated and under clean conditions) |
| Admissible operating temperature2) |
Valve body |
≤120°C |
| Controller |
max. 50°C (≤ 35°C recommended) |
| Mounting position |
DN100 ~ 250 |
Any3) |
| DN320 ~ 500 |
horizontal only3) |
| Material |
Valve body, plate |
6061-T6 |
| Sealing ring |
6061-T6 |
| Other parts |
SUS 316L |
| Seal (Bonnet, plate, body, feedthought) |
FKM(Viton®) |
| Feedthrough |
Actuator |
rotary feedthrough |
| Sealing ring |
shaft feedthrough |
1) Unheated on delivery.
2) Maximum values : depending on operating conditions and sealing materials.
3) Valve seat on chamber side recommended.
| Power input 1) |
+24 VDC (±10%) @ 0.5V pk-pk max.[connector: POWER] |
| Power Consumtion |
60 W max. (operation of valve with max. load) without PFO 4) |
| Sensor power supply 2) |
+24 VDC (±10%) / 36 W max. [connector : POWER]
±15 VDC (±5%) / 1A max. [connector : SENSOR] |
Input
Output |
| Sensor input |
0-10 VDC
100 kΩ
0.23 mV
10 ms |
Signal input
Input resistance
ADC resolution
Sampling time |
| Digital inputs 3) |
±24 VDC max. |
| Digital outputss 3) |
70 VDC or 70 V peak max.
0.5 ADC or 0.5 A peak max.
10 W max. |
Input voltage
Input current
Breaking capacity |
| Ambient temperature |
+50 °C max. (<35 °C recommended) |
| Pressure control accuracy |
0.1% of sensor full scale |
| Position resolution / position control capability |
13,000 steps (full stroke) |
| time throttling only |
closing |
1.1 ~ 1.5 s (full stroke) |
| opening |
1.1 ~ 1.5 s (full stroke) |