ECM Group

R&D and Pilot Production Compact & flexible semiconductor wafer processing furnaces (with horizontal & vertical configurations) perfectly adapted for small laboratories, research facilities or universities for R&D and pilot production capabilities.

Mass Production Semiconductor wafer processing furnaces (with horizontal & vertical configurations) from 4’’ to 12’’ chambers & up to 400 wafers batch for mass production including high processes flexibility specific to your application

SiC & Sapphire Ingot Growth SiC wafer processing systems. We have combined our knowledge of crystal growth and heat treatment to develop our PVT furnace. This equipment enables the growth of silicon carbide to produce SiC wafers for the semiconductor industry.

With systems installed in 50 countries Annealsys is a leading manufacturer of Rapid Thermal Processing (RTP and RTCVD) and Direct Liquid Injection Deposition (CVD and ALD) systems. We are supplying number of companies for the manufacturing of MEMS, sensors, optoelectronics, telecommunication, power and discrete devices. Many famous laboratories worldwide are using our machines for the development of future semiconductor, photovoltaic and nanotechnologies components.

We push the limits of rapid thermal annealing with:

• Cold wall chamber technology
• High temperature (2000°C)
• High vacuum capabilities
• Fast cooling solutions and pulse annealing mode for processing thermally sensitive substrates.

The Direct Liquid Injection deposition tools developed for deposition complex oxides and 2D materials. These systems can use the widest range of organometallic chemicals like low vapor pressure and thermally unstable precursors. Our philosophy involves building up a long-term relationship with our customers, providing high reliability and high quality tools, insuring low cost of ownership & offering outstanding customer support.

SEMCO - Global Clamping Solutions for Advanced Semiconductor Processing

Semco Engineering, Inc., a subsidiary of Semco Technologies, specializes in Electrostatic Chucks. Semco''s Electrostatic Chucks are plug and play and are available in multi polarities, are reworkable, and have an excellent thermal transfer under vacuum. Semco''s patented ESC technology provides long lifetime and high reliability.  Additionally, our ESC''s work in a temperature range from -150°C upto 650°C, and can include embedded heaters up to 550°C.

ECM Components - Trustworthy components for critical processes

FLOWLINK: Complete range of gas components dedicated to the distribution of pure & corrosive gases (bellows valves and diaphragm valves, control valves, manifolds, check valves, filters & accessories). Value propositions customizable on request. 100% assembed in France

KEMSTREAM: Direct Liquid Injection (DLI) vaporizers for CVD, MOCVD, PECVD, ALD, PEALD, ALE & all gas-phase processes. Vapbox DLI vaporizers capable of vaporizing broad spectrum of organic/organometallic precursors at atmospheric pressure or under vacuum