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LOT Vacuum Co., Ltd.

Osan-si,  Gyeonggi-do 
Korea (South)
http://www.lotvacuum.com
  • Booth: 1090

Total Vacuum Solution | LOT Vacuum, Korea’s Global Player

Overview

With the best vacuum technology and solutions, LOT Vacuum is taking a leap forward to become a global player.
LOT Vacuum is the only company within Korea competing on a global scale. 

Until the early 2000s, Korea was heavily dependent on foreign dry vacuum technology. However, with the foundation of LOT Vacuum in 2002, LOT Vacuum was responsible for the global markets paradigm shift with independent R&D and a customer-centric mindset/strategy.

In the beginning, LOT Vacuum helped develop the domestic market by establishing technological independence and localizing vacuum products and their supply chain. As a result, we are now the No.1 dry pump provider in Koreas semiconductor market.

We are continuously developing new solutions and next-generation models all while working closely with our customers and partners around the world.

Moving forward, we will take a new leap as the true global Total Vacuum Solution Provider by expanding our business areas and strengthening our technology capabilities. Together, we will continue to grow our company values and spread happiness among all of us/ be a driving force for the development of the industry.


  Press Releases

  • LOT Vacuum produces dry vacuum pumps, used to remove byproducts created in the semiconductor manufacturing process. As a key equipment directly linked to production yield, the company’s vacuum pumps are mostly used in etching/deposition processes requiring an ultra-high vacuum environment.

    Growth in market size on technological shift + increase in market share on chipmaker efforts to increase local procurement

    Vacuum pumps are general-purpose equipment that can be used in the production of memory/non-memory chips as well asdisplays. We expect LOT Vacuum to see a boost in vacuum pump sales volume alongside the increase in the number of etching/deposition process steps from the advancement in semiconductor production technology.

    In NAND, the number of process steps should sharply increase from the shift to multi-tier structures on the advancement beyond 128 layers for V7. This should lead to a surge in sales volume of LOT Vacuum’s etching/deposition-use vacuum pumps.

    In DRAM and non-memory, the adoption of EUV (Extreme Ultraviolet Lithography) technology is expected to drive up demand for ultra-high vacuum turbomolecular pumps. Although yet to be included in LOT Vacuum's product lineup, these high-performance pumps are currently under development backed by government support as a national project.

    We expect LOT Vacuum to benefit from domestic chipmaker efforts to increase local procurement of key equipment as Korea’s only manufacturer of dry vacuum pumps. The company stands to gain domestic market share at the expense of its main foreign rival, Edward Korea, in the supply of vacuum pumps to Samsung Electronics, SK Hynix, LG Display, and Samsung Display. With Edward Korea supplying more than half of all vacuum pumps used by Samsung Electronics in the etching process, we see ample upside to LOT Vacuum's domestic market share in vacuum pumps from current 12%.


    Businesskorea(https://www.businesskorea.co.kr)

  Products

  • HD Series, RD Series
    HD Series (HD120, HD600, HD1200, HD2400, HD3000, HD3500, HD4500, HD5500, HD7500, HD150K, HD200K) RD Series (RD200, RD602, RD700, RD707, RD1407, RD2007, RD3009, RD3010, RD1803, RD3003, RD12006)...

  • HD Series
    The HD Series is Korea’s only dry vacuum pump capable of handling various harsh processes, with outstanding advantages in powder handling.

    RD Series
    The RD Series is a low-power vacuum pump independently developed based on LOT Vacuum’s proprietary technology. It uses a multi-roots type rotor, enabling fast tact time and excellent durability with low power consumption.

    -  Both the HD and RD Series have a strong track record of continuous collaboration and supply with major semiconductor and display manufacturers. They are most widely used in semiconductor processes such as Etch, CVD, Load Lock, and Diffusion, and have numerous global references.

    - LOT Vacuum’s pumps maintain stable performance even during long-term operation and contribute to improved energy efficiency through low power consumption, reflecting the company’s ESG-centered management philosophy.

    - LOT Vacuum has its headquarters, production facilities, and R&D center in Korea, as well as subsidiaries in China and the United States. In addition, with repair shops and service networks across Asia, the company is fully equipped to respond to diverse customer demands through robust manufacturing and repair capabilities.


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