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Polyteknik AS

Oestervraa,  Denmark
http://www.polyteknik.com
  • Booth: 533

Welcome to POLYTEKNIK AS - When Thin Film Matters!

Overview

Polyteknik AS is a European based PVD equipment manufacturer with an innovative and best service approach. With more than 30 years in business, a strong reference list, and an excellent platform of technology, Polyteknik AS has turned to be an appreciated partner in the thin film industry.

Since the first PVD system was sold in 2007, the company's technology platform has moved from small scale R&D bacth systems to industry proven Flextura 200 and Flextura 300 Cluster systems serving the  especially the wafer based industry. At the same time a market leading GLAD (glancing angle depostion) process module for volume production has been introduced.

Our Flextura Cluster platform for 200 or 300mm wafers is among the most flexible cluster solutions. With a strong install base in Europe - recently especially in Quantum technologies, Neuromorphic computing, NVM, Piezo, Epitaxial growth and many more.

We are the best choice for you, when your thin film matters - polyteknik.com

  Products

  • Flextura 200 Cluster
    The Flextura 200 Cluster platform is probably the most flexible 200mm cluster tool available. It is truly almost Plug&Play and you may add process modules as your need for capacity or new processes increase....

    • CLUSTER PLATFORM HIGHLIGHTS 

    • Process frame for epitaxial growth of thin films at elevated temperatures up to 1000°C
    • Glancing angle deposition on wafers in volume production
    • Dynamic in-situ feedback control by PEM or RGA in reactive sputtering
    • Electrostatic chuck (ESC) with backside gas for substrate cooling or heating, RF/DC bias option
    • P-chuck – pneumatic chuck with edge clamp
    • Remote Plasma Sputtering technology
    • SECS/GEM, Direct SQL server logging
    • Market leading process software technology for accurate real time control of deposition
    • Bridge tool – from R&D to 200mm wafers – standard SEMI or custom cassette 

    SPUTTERING MODULES 

    The Magnetron Sputtering modules of the Flextura PVD platform handles sputtering processes from well-known standard metallisation or electrode layers to reactive sputtering of highly c-axis oriented and low stress AlN, TCO’s or even ternary alloys.

    • Direct planar sputter module
    • Confocal sputtering
      • Multiple magnetrons
      • Multilayers in one module
      • Co-sputtering
    • Linear sputtering
      • Single or dual magnetrons
      • Planar or rotatable setup
    • HiPIMS sputtering module
      • High aspect ratio metallisation
      • Layer property tuning
    • DC, pDC, and RF, Bipolar magnetron sputtering
    • Reactive and nonreactive sputtering

    GLAD MODULE 

    The Flextura GLAD module is a production proven glancing angle evaporation module for industry scale volumes with fully automated substrate handling from cassette. Fully compatible with standard top-down processing ensuring fast and direct integration with complementary processes like degas, etch or sputtering.

    • Proven up to 200 mm diameter substrates
    • Rotation: 0-40 rpm, tilt: 0-180°, resolution 0.1°
    • GLAD stage with water cooling, ESC, or pneumatic chuck
    • Special ebeam crucible with 12x60cc pockets
    • Automatic pellet feeder option
    • Low base pressure <5E-8 mbar
    • SECS/GEM, MES direct SQL server logging

    Proof of concept or contract R&D available for 100 mm!

    DEGAS, PRE-CLEAN & ETCH 

    Substrate degas or pre-clean can be essential for your process or essential for your throughput.

    • Hot chuck degas or quartz lamp modules
    • RF Etch Module
    • ICP soft etch module

    EVAPORATION MODULES 

    The Evaporation modules covers a range of evaporation processes and combinations of these including e-beam, thermal evaporation, resistive evaporation, as well as ion beam assisted deposition (IBAD).

    Though not well known as a process in connection with a cluster tool, the Flextura evaporation modules can be connected to the Flextura Cluster platform for single substrate processing of advanced processes like high temperature epitaxial growth (still mainly R&D), or volume production of GLAD films – directly from cassette.

    • Compatible with top-down  as well as bottom-up processing
    • CMOS compatible

Categories

1 FLEX
  • Tools & Equipment
    • 205 Nanotechnology Equipment and Tools
  • Equipment, Nanotechnology Tools
    • 207 Process Equipment
  • Deposition; (CVD, PVD, ALD, Plating)
  • Deposition; PVD; Sputtering; Evaporation Equipment
    • 307 Process Materials
  • Deposition/Target Materials
    • 700 Manufacturing Services
  • Deposition Service
    • 701 Manufacturing Services or Consulting
  • Equip; Hardware; Product Design, Integration and Mfg.
  • Manufacturing Process Support and Development
  • Wafer Handling

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