The CT Series combines high-accuracy and flexibility in metrology, offering single- and multi-sensor configurations with nanometer resolution. It delivers advanced measurement performance while adapting to a wide variety of applications.
Customizable and adaptable by design, the systems can be configured to meet specific requirements. Up to six different sensor technologies can be integrated in a single platform, providing comprehensive measurement options in one streamlined system.
A range of system sizes is available, from compact table-top models to versions with scanning areas of up to 650 × 650 mm² for large panels. Specialized configurations such as the industry-standard CT300 and CT350 are widely used for substrates, JEDEC trays, boats, wafers up to 12", and other components within the system size. Double-sided models allow simultaneous measurement of top and bottom surfaces, delivering absolute thickness values in a single scan. For maximum efficiency, measurement processes can be fully automated, enabling consistent results and high throughput without operator intervention and SECS/GEM capability .