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NOVASEN

Busan,  Korea (South)
http://www.novasen.net
  • Booth: 5659

Welcome to NOVASEN, NO 1 VALVE

Overview

[ABOUT COMPANY]

Welcome to NOVASEN. NOVASEN first started in 2004 as a Research and Development based on Sensors and Control systems. Through the steady R&D about Sensors and Control Systems, NOVASEN has increased our brand name in this Area. With our outstanding technology, NOVASEN has succeeded in providing APC Control Butterfly Valves worldwide. NOVASEN aims to be the world best leader in APC Control Valves of Vacuum technologies

[MAIN PRODUCTS]

* APC Butterfly Valve : This valve is for CVD for Semi, Display, and Solar or 2nd Battery process

* APC Pendulum Valve : This valve is for Etcher process for Semi and Display Area

* APC Butterfly Valve(Economic Type) : This valve is usually for Solar or 2nd Battery process


  Products

  • APC Butterfly Valve
    This valve is for CVD for Semi, Display, and Solar or 2nd Battery process...

  • Pressure range at 20°C 1 × 10E-8 mbar to 1.2 bar (abs)
    Leak rate to outside at 20°C 1 × 10E-9 mbar l/s
    Cycles until first service 2’000’000 (unheated and under clean conditions)
    Admissible operating temperature +10℃ to +150℃
    Mounting position Any
    Control unit for ISO-KF version needs support when mounted
    on horizontal piping and control unit does not hang.
    Wetted materials- Body, plate
    - Shaft
    - Plate screws
    Body, Plate - Stainless steel 304 , Aluminum 6061
    Shaft - Stainless steel 316L
    Plate screws - Stainless steel 304
    - Shaft seal VitonⓇ (standard). Other materials available on request. Seal materials are v declared on dimensional drawing of specific valve ordering number
    - Slide bearing for shaf glidurⓇ X
    Power input 1) +24 VDC (±10%) @ 0.5V pk-pk max.[connector: POWER]
    Power Consumtion 80 W max. (operation of valve with max. load) without PFO4)
    Sensor power supply 2) +24 VDC / 1500 mA max. [connector: POWER]
    ±15 VDC (±5%) / 667 mA max. [connector:SENSOR]
    - Input
    - Output
    Sensor input 0-10 VDC / Ri>100 kΩ [connector: SENSOR]
    0.16 mV
    1 ms
    - Signal input
    - ADC resolution
    - Sampling time
    Digital inputs 3) ±24 VDC max
    Digital outputss 3) 70 VDC or 70 V peak max.
    0.5 ADC or 0.5 A peak max.
    10 W max.
    - Input voltage
    - Input current
    - Breaking capacity
    Ambient temperature 0 ℃ to +50 ℃ max. (<35 ℃ recommended)
    Pressure control accuracy 5 mV or 0.1% of setpoint, whichever is greater
    Position resolution / position control capability 20000
    Actuating time closing 0.3 s typ.
    opening 0.3 s typ.
    Utilizable valve torque 2.5 Nm
  • APC Pendulum Valve
    This valve is for Etcher process for Semi and Display Area...

  • Pressure range at 20°C1) Blank aluminum 1 × 10E-8 mbar to 1.2 bar (abs)
    1 × 10E-6 mbar to 1.2 bar (abs)
    Hard anodized aluminum
    Leak rate to outside at 20°C1) Valve body : Blank aluminum 1 × 10E-9 mbar l/s
    Hard anodized aluminum 1 × 10E-5 mbar l/s
    Valve Seat : Blank aluminum 1 × 10E-9 mbar l/s
    Hard anodized aluminum 1 × 10E-4 mbar l/s
    Cycles until first service1) Pressure control 1 million
    Closing / opening 200,000 (unheated and under clean conditions)
    Admissible operating temperature2) Valve body ≤120°C
    Controller max. 50°C (≤ 35°C recommended)
    Mounting position DN100 ~ 250 Any3)
    DN320 ~ 500 horizontal only3)
    Material Valve body, plate 6061-T6
    Sealing ring 6061-T6
    Other parts SUS 316L
    Seal (Bonnet, plate, body, feedthought) FKM(Viton®)
    Feedthrough Actuator rotary feedthrough
    Sealing ring shaft feedthrough

    1) Unheated on delivery.
    2) Maximum values : depending on operating conditions and sealing materials.
    3) Valve seat on chamber side recommended.

     
    Power input 1) +24 VDC (±10%) @ 0.5V pk-pk max.[connector: POWER]
    Power Consumtion 60 W max. (operation of valve with max. load) without PFO 4)
    Sensor power supply 2) +24 VDC (±10%) / 36 W max. [connector : POWER]
    ±15 VDC (±5%) / 1A max. [connector : SENSOR]
    Input
    Output
    Sensor input 0-10 VDC
    100 kΩ
    0.23 mV
    10 ms
    Signal input
    Input resistance
    ADC resolution
    Sampling time
    Digital inputs 3) ±24 VDC max.
    Digital outputss 3) 70 VDC or 70 V peak max.
    0.5 ADC or 0.5 A peak max.
    10 W max.
    Input voltage
    Input current
    Breaking capacity
    Ambient temperature +50 °C max. (<35 °C recommended)
    Pressure control accuracy 0.1% of sensor full scale
    Position resolution / position control capability 13,000 steps (full stroke)
    time throttling only closing 1.1 ~ 1.5 s (full stroke)
    opening 1.1 ~ 1.5 s (full stroke)
  • APC Butterfly Valve(Economic Type)
    This valve is usually for Solar or 2nd Battery process...

  • Pressure range at 20°C

    1 × 10E-8 mbar to 1.2 bar (abs)

    Leak rate to outside at 20°C

    1 × 10E-9 mbar l/s

    Cycles until first service

    1,000,000 (unheated and under clean conditions)

    Admissible operating temperature

    +10 ℃ to +150 ℃

    Shaft seal

    • Body, plate
    • Shaft
    • Plate screws

    Body, Plate - Stainless steel 304, 316L , Aluminum 6061 Shaft - Stainless steel 304, 316L

    Plate screws - Stainless steel 304, 316L

    Shaft seal

    VitonⓇ (standard). Other materials available on request. Seal materials are declared on dimensional drawing of specific valve ordering number

    Power input

    +24 VDC (±10%) @ 0.5V pk-pk max. [connector: POWER]

    Power Consumption

    80 W max. (operation of valve with max. load)

    Sensor input

    • Signal input
    • ADC resolution
    • Sampling time

    0-10 VDC / Ri>100 kΩ [connector: SENSOR]

    2.44 mV

    1 ms

    Sensor input

    24 VDC max.

    Digital outputs

    • Input voltage
    • Input current

    SSR Relay Dry contact 24 VDC max.

    0.5 A peak max.

    Ambient temperature

    0 ℃ to +50 ℃ max. (<35 ℃ recommended)

    Pressure control accuracy

    10 mV or 0.5 % of setpoint, whichever is greater

    Position resolution / position control capability

    10,000

    Actuating time

    closing

    1.5 s typ

    opening

    1.5 s typ


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