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Pivotal Systems

Fremont,  CA 
United States
http://www.pivotalsys.com
  • Booth: 6375

Welcome to Pivotal Systems' booth!

Overview

Pivotal Systems provides the best-in-class gas flow monitoring and control technology platform for the global semiconductor industry. The company’s proprietary hardware and software utilizes advanced machine learning to enable preventative diagnostic capability resulting in an order of magnitude increase in fab productivity and capital efficiency for existing and future technology nodes.

The platform includes not only Pivotal’s Gas Flow Controller (GFC) product lines that offer high-accuracy, real-time monitoring and control of the most critical parameters difficult to control in wafer processing today: Gas Flow and Chamber Condition, but also advanced Flow Ratio Controller (FRC), Positional Mass Flow Controller(PFC), Pressure Controller, Ultra High-Speed Valve and etc.

Our Gas Flow Controllers (GFCs) and Flow Ratio Controllers (FRCs) that meet our customers’ flow needs across industries and applications where precise, accurate, and controlled flow is required.

  Press Releases

  • Fremont, California — September 22, 2025 — Pivotal Systems Corporation, a leader in gas flow solutions that enables AI chip manufacturing, was honored to host YAB Dato’ Onn Hafiz bin Ghazi, the Menteri Besar (Chief Minister) of Johor, who is the head of the government in the Malaysian state of Johor, along with his state delegation and the Malaysian Investment Development Authority (MIDA), at its Fremont headquarters. 

    Notable developments for the Malaysian state of Johor includes the current development of the Johor-Singapore Special Economic Zone (JS-SEZ), a strategic initiative aimed at deepening economic cooperation between Johor, Malaysia, and Singapore. The JS-SEZ was designed to leverage the complementary strengths of both regions and aims to promote investment, enhance trade, and create job opportunities.  

    This significant onsite visit underscored Pivotal Systems’ Stage 2 expansion plans and its commitment in Malaysia by having it potentially serve as the one of the new primary locations to further support the expanding demand for next generation semiconductor manufacturing. This supports the long-term government goals under Malaysia’s New Industrial Master Plan (NIMP) 2030. The state of Johor holds a leading position among the Malaysian states for industrial growth attracting significant foreign direct investment (FDI). Pivotal looks forward to continuing working with the state of Johor to explore the benefits from its strategic location, strong infrastructure, modern transportation, and business-friendly support from its local government. 

    About Pivotal Systems 

    Pivotal Systems Corporation provides best-in-class gas flow control platforms for the global semiconductor industry. Its innovative products enable precise, repeatable, and real-time gas flow control essential for advanced semiconductor manufacturing. Headquartered in Fremont, California, with a growing global footprint, Pivotal Systems serves leading semiconductor equipment manufacturers and integrated device manufacturers (IDMs) around the world. Pivotal is committed to innovation, operational excellence, and enabling the future of semiconductor manufacturing. 

    For more information about Pivotal Systems and its full range of gas flow control devices, visit www.pivotalsys.com. 

  • Fremont, California – October 7, 2025 — Pivotal Systems Corporation, a leader in gas flow solutions that enables AI chip manufacturing, released compelling test performance results that establish its GFC-X product as the clear industry benchmark.

    Technical Differentiation: Faster, Smarter, More Reliable

    Against leading competitors for semiconductor manufacturing, the Pivotal GFC-X demonstrates superior technical differentiation across all critical performance metrics:

    • Drift Free High Accuracy and Ultra-High Speed – Pivotal GFC-X enables near-instantaneous gas flow transitions leading to faster cycle times and more efficient wafer processing.
       
    • Super Low Leak-By – Improves process consistency by preventing waste, contamination, and unnecessary valve pressure changes in the system.
       
    • High Productivity and Longer Lifetime – Optimized for durability and proven long-term stability that lowers the overall cost of ownership.
       
    • Built-in Machine Learning + Self-Diagnosis – Embedded machine learning and self-diagnostics allows it to continuously adapt, refine, and self-correct in real-time.

    Economic Advantage for Advanced Nodes

    Pivotal GFC-X differentiators lead to faster production cycles for advanced next-generation nodes with 3x-5x faster response times compared to the closest competitors. The economic benefits for global semiconductor manufacturers are compelling with performance data that indicates:

    • More wafer production output with range of 10%-70% more wafers per hour (wph) at an average of 50% more wph that equates to approximately 10% higher throughput.
       
    • Equivalent to an annual upside of $70.5 million to $493.5 million in added value per machine to chipmakers, at an average annual upside of $352.5 million.

    These examples highlight how Pivotal’s innovation in gas flow control is reshaping the economics of advanced process nodes. As semiconductor nodes scale down to 1.4nm and process windows tighten, differentiation in gas flow control directly defines industry competitiveness. The GFC-X is designed not only to outperform peers, but to deliver a step-change in higher throughput, higher yield, and better cost efficiency for customers. Pivotal Systems is actively working with leading global OEMs and foundries to integrate the GFC-X across a wide range of advanced applications.

    About Pivotal Systems
    Pivotal Systems Corporation provides best-in-class gas flow control platforms for the global semiconductor industry. Its innovative products enable precise, repeatable, and real-time gas flow control essential for advanced semiconductor manufacturing. Headquartered in Fremont, California, with a growing global footprint, Pivotal Systems serves leading semiconductor equipment manufacturers and integrated device manufacturers (IDMs) around the world. Pivotal is committed to innovation, operational excellence, and enabling the future of semiconductor manufacturing.

    For more information about Pivotal Systems and its full range of gas flow control devices, visit www.pivotalsys.com. 

  Products

  • GAS FLOW CONTROLLER S SERIES (GFC-S)
    Pivotal Systems’ GFC-S series paves the way for the future of gas flow control!...

    • The GFC-S combines Pivotal's patented, high accuracy GFM™ system with its patented control valve technology making the GFC-S the fastest, most accurate, most reliable mass flow controller on the market.  The GFC-S is also calibration and maintenance free, increasing your fab productivity, gas savings, and reducing environmental impact!

    As process geometries within the semiconductor industry continue to shrink to 2nm and beyond, the need for highly accurate, responsive and repeatable gas flow control during wafer processing is essential. With the emergence of low gas flow rates, short processing times and continuous plasma processing, best-in-class MFCs are struggling to meet the accuracy, settling time and repeatability requirements demanded to ensure high yield and matched chambers.

    Pivotal Systems’ GFC-S paves the way for the future of gas flow control. The GFC combines Pivotal's patented, high accuracy GFM™ system with patented control valve technology. As such, it leapfrogs the current MFC technology by offering an order of magnitude improvement on key flow metrics, thereby enabling advanced wafer-manufacturing processes. 

    Feature Description:

    Wide Flow Range:Full Scale 0.5−100%

    Best Flow Accuracy: ±0.5% of Setpoint for 0.5−100% Full Scale

    Fastest Settling Time for Turn-On and Turndown:  ≦ 100ms:10% -100% Full Scale; ≦ 300ms:0.5% -10% Full Scale 

    Effect of Pressure and Temperature: Invariant

    Automated In Situ Calibration: NIST Traceable

    Innovative Control Technology: Robust Design, No Orifice

  • GAS FLOW CONTROLLER X SERIES (GFC-X)
    Pivotal Systems’ GFC-X paves the way for the future of gas flow control, enabling flows up to 50 SLM. The GFC-X is Pivotal's new high flow enabling GFC that combines a differential pressure sensor with Pivotal's patented control valve technology....

    • As process geometries within the semiconductor industry continue to shrink to 3 nm and beyond, the need for highly accurate, responsive and repeatable gas flow control during wafer processing is essential. With the emergence of low gas flow rates, short processing times and continuous plasma processing, best-in-class MFCs Introduction are struggling to meet the accuracy, settling time and repeatability requirements demanded to ensure high yield and matched chambers.

    Pivotal Systems’  GFC-X paves the way for the future of gas flow control. The GFC-X combines a differential pressure with patented control valve technology. As such, it leapfrogs the current MFC technology by offering an order of magnitude improvement on key flow metrics, thereby enabling advanced wafer-manufacturing processes. 

  • GAS FLOW CONTROLLER T SERIES (GFC-T)
    The GFC-T is Pivotal Systems' thermal series....

    • The GFC-T is Pivotal Systems' thermal series.

Categories

400 Components, Parts & Accessories
  • Flow Control: Valves; Meters; Gauges; Regulators; MFC's
    • 500 Factory Monitoring & Control Systems (FMCS)
  • Gas Monitoring Equipment; RGA's; TGO compliance

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