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Agileo Automation

POITIERS,  France
https://www.agileo.com
  • Booth: 877

For All Your Control & Connectivity Solutions!

Overview

Agileo Automation provides control and connectivity solutions for semiconductor equipment manufacturers

Our customers are Original Equipment Manufacturers of production machines that equip the factories of semiconductor and precision electronics companies worldwide. We provide SECS/GEM and GEM300 licensed libraries, EDA Interface Libraries, SECS/GEM Host Emulation and Test Systems, equipment system control libraries and cost-competitive integration services to a global installed base. As a complete solution provider, we develop software modules that are integrated either by our engineering team or by our customers for their production process and metrology machines.

Agileo has first hand understanding of the issues faced by semiconductor equipment manufacturers and instills this mindset throughout the company by:

- Understanding the role of the machine and its hardware architecture
- Working with end customers' tool owner and IT team
- Bringing the machine into production within the agreed deadlines
- Prioritizing the support of software and technicians in the field


  Press Releases

  • Media contact

    Muriel Guilbert

    [email protected]

    RECIF Technologies Adopts Agileo Automation’s Combined Speech Scenario and E84 PIO Box Solution to Test E84 and SECS/GEM SEMI Standard Compliance of Wafer Handling and Tracking Equipment

    Global French manufacturer of automated handling equipment, wafer sorters, and equipment front-end modules (EFEMs) saves significant fab equipment integration time and enhances customer satisfaction

    PHOENIX, October 7, 2025 – Agileo Automation, a leading provider of control and connectivity solutions for global semiconductor manufacturing equipment, today announced at Booth #877 at SEMICON West 2025 that RECIF Technologies has adopted its combined Speech Scenario and E84 PIO Box solution to test its wafer handling and tracking equipment for E84 and SECS/GEM compliance. The global company headquartered in Toulouse Blagnac, France, which specializes in the design, manufacturing, and installation of automated equipment for semiconductor wafer handling, needed a fast and effective solution to validate the compliance of its products with SEMI’s E84 and SECS/GEM standards before they are shipped and implemented at customers’ semiconductor manufacturing sites all over the world.

    Speech Scenario is a software that emulates the fab host to validate SECS/GEM tool scenarios before shipping brand-new production equipment to fabs. The E84 PIO Box is a compact and lightweight device that serves as an interface between Speech Scenario and E84 passive equipment. Used together, these products allow RECIF Technologies to generate complete test reports that can be communicated to its customers, ensure fast detection of non-compliance and errors to avoid downtime, as well as quick and reliable SEMI E84 and SECS/GEM compliance testing, especially in the management of complex cases. The company has now better control over host-sorter interactions, with customizable scenarios related to automatic carrier delivery defined in the E84 standards. With Speech Scenario, RECIF teams can more effectively replicate customer use cases when resolving anomalies.

    “We were using less flexible software where automation messages were not easily modifiable and old emulation technology for validation of only the PIO part of the E84 standard, which meant that more complex cases and host-sorter interactions had to be tested and adapted in the field during machine integration at customer sites,” explains Thomas Brillouet, research and development director for RECIF Technologies SAS. “We selected Agileo’s all-in-one Speech Scenario and E84 PIO Box solution because we believe that it is the most efficient and competitive product currently on the market. The flexibility and time savings we have garnered since using Agileo’s solution has translated into enhanced overall customer satisfaction for our company.”

    “Over the past 40 years, RECIF Technologies has built a solid reputation as an innovative industry leader in advanced semiconductor equipment manufacturing and as an early adopter of SEMI standards,” adds Marc Engel, CEO of Agileo Automation. “Agileo Automation, whose origins are closely tied to RECIF Technologies, benefits from a strong cultural and technical proximity with the company. We are proud to contribute to RECIF Technologies’ success, both as a technology partner and by supporting them in demonstrating quality and reliability to their customers.”

    - ends -

    About Agileo Automation

    Since its inception in 2010 in Poitiers, France, Agileo Automation has empowered global semiconductor equipment manufacturers to optimize their production machines with control, communication, data acquisition, and testing solutions, enabling their deployment in large-scale fabs worldwide. At the heart of Industry 4.0, Agileo’s A²ECF-SEMI framework provides a robust foundation for developing equipment controller software, leveraging the SEMI SECS/GEM and GEM300 standard suites. As a member of SEMI and the OPC Foundation, Agileo Automation is a key contributor to the development and integration of industry standards such as SEMI and OPC UA. For more information, please visit our web site or follow us on LinkedIn.

    About RECIF Technologies

    RECIF Technologies, headquartered in Toulouse-Blagnac, France, has been providing advanced robotic solutions for semiconductor wafer handling since 1985. The company designs and manufactures reliable sorters, EFEMs, and compact handling tools that help leading semiconductor manufacturers worldwide improve productivity, ensure reliability, and reduce total cost of ownership. As a member of SEMI and the Aeneas association, RECIF Technologies actively contributes to the industry standards and collaborative projects shaping the future of the semiconductor industry. For more information, please visit our web site or follow us on LinkedIn.


  Products

  • Agil'GEM
    Agil'GEM is a SECS/GEM and PV2 Software library for semiconductor, electronics and photovoltaic production equipment connectivity....

  • GEM services:

    • Equipment communication state and control state
    • Process program
    • Collection event sending
    • Variable data collection
    • Status data collection
    • Remote control
    • Alarm management
    • Equipment constants
    • Equipment Terminal Services
    • Clock
    • Trace data collection
    • Limits monitoring

    SEMI standards:

    • SEMI E4 SECS-I (serial protocol)
    • SEMI E37.1 HSMS-SS (ethernet protocol)
    • SEMI E5 SECS-II (message format)
    • SEMI E30 GEM

    Agil'GEM comes with a free manual version of Speech Scenario, our host simulator software for testing.

  • Agil'GEM300
    Agil'GEM300 is a complete .NET/C# solution for GEM300 connectivity. It handles the complexity of GEM300 automation and provides a simple interface to connect a semiconductor equipment controller application to the factory host....

  • GEM300 services : 

    • Carrier and load port management

      • Carrier ID verification

      • Slot map verification

      • Both manually and through OHT 

    • Process job management

    • Control job management

    • Substrate tracking in the equipment with substrate ID verification 

    • Equipment performance tracking

    • Module performance management

    • Collaboration between standards managed by Agil’GEM300 with minimal integrator interaction 

    • Include Agil'GEM

    SEMI standards : 
    The following are supported in Agil'GEM300:

    • SEMI E-87 – Carrier management

      • Fixed buffer

      • Internal buffer 

    • SEMI E-40 – Processing management 

    • SEMI E-94 – Control job management 

      • Material redirection

    • SEMI E-90 – Substrate tracking

      • Single substrate tracking 

      • Batch tracking 

    • SEMI E-116 – Equipment performance tracking

    • SEMI E-157 – Module process tracking 

    • SEMI E-39 – Object services 

    • SEMI E-30 – GEM​​​​​​

    • SEMI E4 – SECS-I (serial protocol)

    • SEMI E37.1 – HSMS-SS (ethernet protocol)

    • SEMI E5 – SECS-II (message format)

    Agil'GEM300 is delivered with a sample program which allows the user to test and observe the implementation of each functionality of the Agil'GEM300 components. It can also be connected directly to a host or a simulator such as Speech Scenario (a GEM300 test plan is provided with Speech Scenario).

  • Agileo Automation Equipment Control Framework
    Robotic Control, Scheduling and GEM300 Connectivity of Semiconductor Cluster Tool A²ECF Semi is a software framework for process or metrology equipment control including EFEM (robotics loading platform) management....

  • Higly customizable, this SEMI E95 compliant framework A²ECF proposes a standardized way to present user interface for semiconductor applications:

    • Multiuser management with access rights (operator, process engineer, field service engineer for example)
    • Automatic trace generation with tools to analyze equipment activity
    • Operator actions recording
    • EFEM devices management such as (contact us for list of supported devices):
      • Wafer handlers with one or dual arms
      • Pre-aligners
      • Load Ports and FOUP Openers
      • Scribe readers
    • Schedulers for wafer flow sequencing
    • Data collection to the Fab Host and Remote control through SECS/GEM and PV2 interface library Agil'GEM or GEM300 (GEM + 300mm automation standards including in particular Carrier Management, Process Job, Control Job and Substrate Tracking through Agil'GEM300)

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