HD Series
Hybrid Screw Rotor Design
→ Equipped with a hybrid screw that combines lobe and screw types, providing excellent powder handling capability. The short gas path further enhances powder processing performance.
Low Power Consumption
→ With the hybrid screw compression structure, the HD series consumes less power compared to the DD series.
RD Series
Multi Roots Rotor Design
→ Implements a multi-roots rotor structure to achieve high compression ratios and maximize energy efficiency.
→ Versatile pump applicable across a wide range of processes, from process chambers to load lock.
Specialized for Light Gas Handling
→ The extended gas path effectively prevents back streaming, offering superior performance in handling light gases.
- LOT Vacuum’s pumps maintain stable performance even during long-term operation and contribute to improved energy efficiency through low power consumption, reflecting the company’s ESG-centered management philosophy.
- LOT Vacuum has its headquarters, production facilities, and R&D center in Korea, as well as subsidiaries in China and the United States. In addition, with repair shops and service networks across Asia, the company is fully equipped to respond to diverse customer demands through robust manufacturing and repair capabilities.