HD Series
The HD Series is Korea’s only dry vacuum pump capable of handling various harsh processes, with outstanding advantages in powder handling.
RD Series
The RD Series is a low-power vacuum pump independently developed based on LOT Vacuum’s proprietary technology. It uses a multi-roots type rotor, enabling fast tact time and excellent durability with low power consumption.
- Both the HD and RD Series have a strong track record of continuous collaboration and supply with major semiconductor and display manufacturers. They are most widely used in semiconductor processes such as Etch, CVD, Load Lock, and Diffusion, and have numerous global references.
- LOT Vacuum’s pumps maintain stable performance even during long-term operation and contribute to improved energy efficiency through low power consumption, reflecting the company’s ESG-centered management philosophy.
- LOT Vacuum has its headquarters, production facilities, and R&D center in Korea, as well as subsidiaries in China and the United States. In addition, with repair shops and service networks across Asia, the company is fully equipped to respond to diverse customer demands through robust manufacturing and repair capabilities.