ANCORP

ANCORP’s 2-way ball valves consist of a body, stem, ball, and two end caps machined from corrosion-resistant 316L stainless steel. Fluoroelastomers (FKM) are used to seal the stem and end caps from atmosphere while the PTFE seats cold flow around the ball to isolate the process when closed. The valve is opened and closed manually or pneumatically by a 90°, quick-turn actuation. The PTFE sealing surface is protected from direct deposition, maintaining a clean dynamic seal to prevent failure due to contamination

ANCORP’s Multiport valve is a high vacuum valve designed for 3-way, 4-way, or 5-way flow in demanding semiconductor and coating processes. Its modular design and configurable components enable a variety of flow patterns through the valve.

The Multiport valve consists of a cube-shaped valve body, a fully stabilized Extended Life (XL) valve stem, a fully ported ball, and end caps (body ports), all machined from corrosion-resistant 316L stainless steel. Flanged body ports or blank end caps are installed on the sides or bottom of the valve body to create a 3, 4, or 5-way valve. An L-port, T-port, or other ported ball rotates within the valve to switch flow between body ports.

The corrosion-resistant, fast-actuating design of the Multiport valve makes it ideal for diverting, switching, combining, or splitting flow in and around reactors, traps, scrubbers, and exhaust lines on vacuum coating, etch, and abatement tools.

ANCORP's multiport valve powered by Heat-Thru technology is designed for high temperature performance. It has been proven to eliminate the cold spot found in other valves installed on major OEM abatement tools.

The heater-optimized multiport valve is equipped with ANCORP’s patent pending Heat-Thru technology that enables maximum heating of the ball when a heating element is used. Specialized Heat-Thru components and a thermally conductive vacuum grease transfer heat efficiently from a heating element through the valve body to the ball while minimizing heat loss through the valve’s stem and actuator. Efficient heating of the ball helps prevent byproduct buildup and deposition inside the ball, thus reducing costly maintenance and downtime.

Our patent-pending Heat-Thru technology excels in applications such as abatement, subfab, and deposition where efficient heating is critical to reducing condensation, inside the valve.