Agileo Automation

Agil'EDA implements Equipment Data Acquisition (EDA), a set of SEMI standards, providing a secure, high-performance connectivity solution.

What is EDA?
EDA is a set of SEMI standards (commonly called Interface A) for data exchange between semiconductor equipment and factory systems. It provides structured and high-frequency data from tools and complements SECS/GEM by adding secured communication and advanced data modeling.

SEMI creates EDA Freeze versions that specify which standards should be used together to enable EDA functionality on tools or within fabs. There are three versions of Freeze:

• Freeze 1: based on SOAP. This version is no longer used.
• Freeze 2: based on SOAP. This is the currently used version which has been released in 2010.
• Freeze 3: based on gRPC. This version has not been released by SEMI yet, but is expected mid-2026.

All major fabs now require EDA Freeze 2.

Why Agil'EDA?
Agil'EDA enables the secure, high-performance collection of structured equipment data through:

• Equipment control (SECS/GEM) and data acquisition separation to ensure tool productivity is not impacted by data collection 
• High-frequency data collection through a dedicated EDA server
• Concurrent access of multiple factory applications to collect data for different use cases
• Standardized and rich equipment models for monitoring, analytics and AI applications
• Secure equipment data access through authentication and encrypted communication 
• Future-proof architecture, designed for a seamless transition to the high-performance EDA Freeze 3 standard (gRPC/HTTP2)

A²ECF Semi is a software framework for process or metrology equipment control including EFEM (robotics loading platform) management.
A²ECF Semi is intended for equipment manufacturers in the semiconductor, electronics or photovoltaic industries.

• Higly customizable, this SEMI E95 compliant framework proposes a standardized way to present user interface for semiconductor applications:
• Multiuser management with access rights (operator, process engineer, field service engineer for example)
• Automatic trace generation with tools to analyze equipment activity Operator actions recording
• EFEM devices management such as (contact us for list of supported devices):
• Wafer handlers with one or dual arms
• Pre-aligners
• Load Ports and FOUP Openers
• Scribe readers
• Schedulers for wafer flow sequencing
• Data collection to the Fab Host and Remote control through SECS/GEM and PV2 interface library Agil'GEM or GEM300 (GEM + 300mm automation standards including in particular Carrier Management, Process Job, Control Job and Substrate Tracking through Agil'GEM300)

Agil'GEM300 is a complete .NET/C# solution for GEM300 connectivity. It handles the complexity of GEM300 automation and provides a simple interface to connect a semiconductor equipment controller application to the factory host.

GEM300 services

• Carrier and load port management
        - Carrier ID verification
        - Slot map verification
        - Both manually and through OHT 
• Process job management
• Control job management 
• Substrate tracking in the equipment with substrate ID verification 
• Equipment performance tracking 
• Module performance management 
• Collaboration between standards managed by Agil’GEM300 with minimal integrator interaction
• Include Agil'GEM
   

SEMI standards
The following are supported in Agil'GEM300:

SEMI E87 – Carrier management
      - Fixed buffer
      - Internal buffer 
SEMI E40 – Processing management 
SEMI E94 – Control job management 
      - Material redirection
SEMI E90 – Substrate tracking
      - Single substrate tracking 
      - Batch tracking 
SEMI E116 – Equipment performance tracking
SEMI E157 – Module process tracking 
SEMI E39 – Object services 
SEMI E30 – GEM​​​​​​
SEMI E4 – SECS-I (serial protocol)
SEMI E37.1 – HSMS-SS (ethernet protocol)
SEMI E5 – SECS-II (message format)