LNEYA Thermo Refrigeration Co.,Ltd.

Wuxi City,,  Jiangsu Province 
China
https://www.lneya-online.com

• Booth: 5758

Overview

LNEYA is committed to providing precise temperature control solutions for the semiconductor industry. As a global industry leader in the development and production of chillers, we provide temperature control design for various semiconductor processes, including but not limited to the following processes: lithography, etching, CVD, PVD, cleaning, testing and packaging, etc. Our customers are located in various countries and regions around the world. Please feel free to contact us for more details. Discover more on https://www.lneya-online.com

  Press Releases

• Detailed applications of semiconductor chillers (Jun 15, 2026)

  Photolithography

  Photolithography machines generate a significant amount of heat during the exposure process. Chillers provide cooling water to maintain a constant temperature for the optical system and laser light source, ensuring exposure accuracy.

  Etching

  Plasma etching equipment requires rapid heat dissipation. Chillers stabilize the chamber temperature within a specified range, ensuring etching uniformity and process repeatability.

  Ion Implantation

  Ion implanters control temperature fluctuations within a specified range by cooling the target and beam components.

  Chemical and Physical Vapor Deposition (CVD/PVD)

  Controlling substrate temperature during the process impacts film quality and enables nanometer-level film thickness control.

  Chemical Mechanical Polishing (CMP)

  Chillers control process temperatures by cooling the polishing pad and drive system, reducing variations in polishing slurry viscosity and improving surface flatness.

  Diffusion & Oxidation

  Chillers can quickly dissipate heat, preventing furnace overheating and maintaining process temperature uniformity.

• Advantages of Semiconductor Chillers (Jun 15, 2026)
  • Highly Efficient Cooling: Semiconductor chillers utilize specialized semiconductor materials, such as thermocouples, to achieve energy transfer and cooling. This technology enables efficient heat transfer and dissipation within a compact footprint, resulting in higher cooling efficiency and faster response times.
  • High Temperature Control Precision: Compared to traditional mechanical or liquid circulation temperature control methods, semiconductor chillers offer more precise temperature differential control and regulation. They can quickly reach the set target temperature and maintain a stable state, meeting the precise temperature requirements of various applications.
  • Energy Saving and Environmental Protection: Semiconductor chillers use environmentally friendly refrigerants, aligning with current trends in green environmental protection.
  • Compact Design: The components used in semiconductor chillers are small and lightweight, making them easy to carry and suitable for applications requiring mobile or portable devices.

• Features of semiconductor chillers (Jun 15, 2026)

  High-precision Control

  The semiconductor chiller uses PID intelligent temperature control and adjustment, with an accuracy of ±0.1℃, ±0.05℃, ±0.02℃ or even higher, and has good stability.

   

  Stability & Security

  The chiller is equipped with multiple safety protection functions such as high and low pressure protection and overload protection, which can achieve 24-hour stable operation.

   

  Environmental Friendly

  The use of environmentally friendly refrigerants meets environmental protection requirements. Equipped with an intelligent control system, it automatically adjusts the cooling power according to demand.

   

  Scalable Solutions

  From small-scale chiller to large industrial facilities, we offer chillers tailored to your process needs.

  Products