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attocube systems Inc.

Berkeley,  CA 
United States
http://www.attocube.com
  • Booth: 6464

attocube - pioneers of precision

Overview

attocube systems was founded in 2001 and is recognized internationally for innovation and excellence in the development, the production, and the distribution of cutting-edge solutions for the most challenging nanotechnology applications in research and industry. Our piezoelectric motors and Fabry- Perot-Interferometry provide precise motion and motion control. Linear, rotary, and goniometric nanopositioners can be operated with nanometer precision in ultra-high vacuum. The Displacement Sensor IDS3010 performs highly accurate measurements on different materials and geometries for vibration measurements, runout measurements of rotations, or calibration of machine tools. The neaSCOPE system is an ultra-stable, easy-to-use instrument for tip-enhanced optical measurements with remarkable scientific impact. Our technology overcomes the limitations of conventional instruments and enables a spatial resolution of just a few nanometers. 


  Products

  • attocube IRa-SCOPE

    Accelerate semiconductor innovation with IRa-SCOPE. 

    For the first time, a single instrument combines groundbreaking nano-IR imaging and spectroscopy with confocal Raman micro-spectroscopy and high-quality Atomic Force Microscopy (AFM). By integrating both light-based (nano-FTIR) and force-based (tapping AFM-IR) nano-IR detection methods, IRa-SCOPE ensures optimal performance across a wide range of sample types and analytical challenges.  

    IRa-SCOPE enables researchers to identify contaminants, characterize advanced materials, analyze thin films and interfaces, investigate process-induced defects, and support failure analysis with comprehensive chemical, structural, and mechanical information. From semiconductor R&D and process development to advanced packaging and next-generation device engineering, IRa-SCOPE delivers actionable insights with exceptional resolution, sensitivity, and ease of use. 

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  • attocube IDS - minitaturized displacement measurement

    Advance precision motion control and metrology with IDS3010.

    IDS3010 is a compact, fiber-based displacement measuring interferometer that delivers traceable nanometer and picometer-scale precision for positioning and measurement applications. Its modular architecture supports up to three measurement axes, while ultra-compact sensor heads enable integration into semiconductor equipment, metrology systems, OEM tools, and research instruments. Certified wavelength accuracy, long-term stability, and compatibility with vacuum and cleanroom environments ensure reliable performance in advanced manufacturing and R&D. 

    IDS3010 helps engineers improve positioning accuracy, monitor vibration and drift, and enable high-performance closed-loop control. From wafer inspection to advanced packaging and next-generation semiconductor equipment development, IDS3010 delivers the precision and stability required for demanding applications.

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  • attocube Nanopositioners for Extreme Environments

    Enable ultra-precise positioning with attocube Nanopositioning Solutions.

    attocube's high-precision motion systems deliver reliable nanopositioning and alignment for semiconductor manufacturing, metrology, inspection, and advanced packaging applications. Designed for ambient and vacuum environments, these piezo-driven positioning stages combine nanometer resolution, high load capacity, and exceptional reliability in a compact form factor. Modular linear, rotary, and multi-axis configurations enable seamless integration into OEM tools, automated production systems, and research platforms. 

    From wafer inspection and optical alignment to motion control in semiconductor equipment, attocube nanopositioners help engineers improve accuracy, stability, and throughput while meeting the demanding requirements of modern manufacturing processes.

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