GfG Instrumentation

• Booth: 6277

Overview

For over 65 years GfG Instrumentation has provided a wide range of gas detection solutions. GfG develops and manufactures an advanced product line of portable gas detectors, fixed systems, and respiratory airline monitors. Our commitment is the protection of life from combustible and toxic gases, and oxygen hazards.

  Press Releases

• New addition to the D-ReX family - D-ReX PoS2 (Sep 01, 2026)

  GfG has expanded its D-ReX family for semiconductor gas monitoring with the new D-ReX PoS². The new model builds on the capabilities of the established D-ReX PoS while introducing a new design focused on simplified service, space-saving installation and a lower total cost of ownership.

  Semiconductor manufacturing relies on a wide range of toxic, corrosive, flammable and highly reactive gases. At the same time, monitoring requirements can differ considerably depending on where a measurement is taken. Gas detection close to a process tool presents different challenges from monitoring exhaust lines or gases associated with scrubbers and other abatement systems.

  This is why GfG approaches semiconductor gas detection as an application-specific task rather than relying on a single monitoring concept. The D-ReX family provides different configurations for monitoring hazardous gases at critical points throughout semiconductor manufacturing – from process-related applications to exhaust and abatement monitoring.

• From specialized detection to complete gas warning (Sep 01, 2026)

  Gas detection within a semiconductor facility extends beyond specialized process gases. A comprehensive safety concept can include monitoring for additional toxic and combustible gases as well as the evaluation and processing of signals from numerous measurement points.

  GfG therefore combines its specialized D-ReX solutions with a broader portfolio of fixed gas detection technology, including gas detection controllers such as the GMA400 and transmitters for combustible gases such as the CC28. Replacement sensors for existing gas detection systems further complement the portfolio.

  With 65 years of experience in gas detection, GfG develops and manufactures gas detection technology at its headquarters in Dortmund, Germany. The company's semiconductor solutions combine sensor technology, application-specific measurement concepts and system integration to address gas monitoring requirements across different areas of semiconductor manufacturing.

• Different processes require different detection co (Sep 01, 2026)

  The PoS² is the latest addition to a broader range of D-ReX solutions developed for the different monitoring requirements found within semiconductor facilities. Depending on the application, the appropriate measurement concept is determined by factors including the target gas, expected concentration, process conditions and location of the measurement point.

  Some semiconductor gases also require an additional step before they can be reliably detected. For these applications, GfG uses pyrolysis technology. The target gas is heated to a defined temperature and decomposed into measurable reaction products. These products are detected by the sensor, allowing the D-ReX to determine the concentration of the original target gas. For example, NF₃ can be thermally decomposed and detected via the resulting HF concentration.

  Together, these different approaches enable gas monitoring concepts to be tailored to specific areas and processes within a fab rather than applying the same detection method to every measurement point.

  Products