The Growing Challenge of Patterned Wafer Inspection
Semiconductor wafer inspection has become a defining factor for yield, reliability, and time-to-market. As devices shrink, patterned wafer inspection becomes more difficult due to dense layouts and complex structures that reduce visual contrast. This allows critical defects to blend into intended features.
Dark‑field inspection is an optical inspection technique used in semiconductor manufacturing that detects defects by capturing scattered light rather than reflected light.Â
Traditional bright‑field approaches often struggle to reveal certain defect types, making alternative inspection modes essential.