Cast Aluminum Solutions LLC

Batavia,  Illinois 
United States
http://www.castaluminumsolutions.com
  • Booth: 1944

Precision-Engineered Thermal Components for Wafer Processing

Overview

Cast Aluminum Solutions designs and manufactures precision-engineered thermal components for the global semiconductor wafer processing market. CAS is a top supplier of high-uniformity, high-temp Pedestal Heaters (Wafer Chucks). Our industry-leading options include Multi-Zone Heating, Embedded Cooling Functions, Integrated Gas Channels, Custom Groove Patterns, Lift-Pin Holes, and Hard-Coat Surface Finishes. Chamber-adjacent products include ring, lid, and faceplate heaters, chamber bottom heaters, and wafer pre-heaters. Resources include a dedicated New Product Development Team and expanded R&D Tech Center w/ ISO Level 6 Cleanroom. Our hi-volume mfg facility fabricates products from aluminum, stainless steel, bronze, Inconel, nickel and specialty alloys. CAS also makes unique inline gas & liquid heaters with isolated fluid paths, suited for low-flash solvents, DI water, process chemicals, carrier & process gases, and HP N2. Visit CAS at Semicon West 2026, Booth 1944 South Hall

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