Precision-Engineered Thermal Components for Wafer Processing
Overview
Cast Aluminum Solutions designs and manufactures precision-engineered thermal components for the global semiconductor wafer processing market.
CAS is a top supplier of high-uniformity, high-temp Pedestal Heaters (Wafer Chucks). Our industry-leading options include Multi-Zone Heating, Embedded Cooling Functions, Integrated Gas Channels, Custom Groove Patterns, Lift-Pin Holes, and Hard-Coat Surface Finishes. Chamber-adjacent products include ring, lid, and faceplate heaters, chamber bottom heaters, and wafer pre-heaters.
Resources include a dedicated New Product Development Team and expanded R&D Tech Center w/ ISO Level 6 Cleanroom. Our hi-volume mfg facility fabricates products from aluminum, stainless steel, bronze, Inconel, nickel and specialty alloys.
CAS also makes unique inline gas & liquid heaters with isolated fluid paths, suited for low-flash solvents, DI water, process chemicals, carrier & process gases, and HP N2.
Visit CAS at Semicon West 2026, Booth 1944 South Hall