Chemical Metrology and Wafer Temperature Monitoring Systems
Overview
CI Semi, a division of CI Systems Ltd, develops, manufactures and markets process monitoring and control systems for the semiconductor, solar PV, LED and FPD markets to OEM toolmakers and end users, alike.
WetSpec process analyzers offer cost effective solutions for in-line and on-line wet chemistry monitoring, ranging from simple chemistries to multiple constituent and complex formulated solutions.
WetAlyzer, a Full Stack On-Line Analyzer, is optimized for advanced cleaning/etching applications. Typical applications: PERR and PAC, W Contact PERR, Hard Mask Opening, PRS, ESL, Poly Etch for Memory (DSP+), Selective Nitride Etch (Hot Phos), Metal Etch and other Commodity and Formulated Chemistries.
CI's noncontact temperature monitors (NTM line) incorporate real-time, same point emissivity measurement and compensation, making them the ideal solution for in situ process monitoring of wafer temperature in dry process chambers.