CI SEMI

Multi Technique Analysis for Critical Wet Chemistries

WetAlyzer™ brings advanced automated chemical metrology to the most demanding semiconductor wet processes across FEOL, BEOL, and Advanced Packaging, including PERR and PAC, photoresist strip and rework, Hot Phos, DSP+, metal etch, Cu CMP, and more.

One platform integrates multiple optical and electrochemical techniques to deliver rapid, precise, and repeatable analysis across multiple chemistry parameters, directly at the process tool.

Automated calibration and built in verification maintain measurement performance in production. Flexible configurations support multiple measurement points, while optimized flow architecture minimizes chemical waste. Modular design, front access, long lifetime consumables, and reduced PM requirements simplify integration and service.

Built for critical chemistries. Built for fab operation.

Non-Contact Chemical Monitoring. Directly at the Process Tool.

WetAlyzer-NL™ brings automated in-line chemical metrology directly to semiconductor wet process tools across Advanced Packaging, BEOL, and FEOL.

Using NIR or UV spectral measurement, WetAlyzer-NL delivers rapid, precise, and repeatable chemical concentration data under real process conditions. Using ClampIt™, a non-contact flow cell, WetAlyzer-NL integrates directly on existing tool lines while minimizing chemical consumption, reducing contamination risk, and chemical exposure.

Automated calibration and built-in verification maintain long term measurement performance. Its compact, modular, operator-friendly, front-access architecture supports up to two tanks and simplifies operation and maintenance.

Built for direct tool integration. Built for stable fab operation.

One Platform. Multiple Chemistries.

WetSpec+™ is an integrated chemical monitoring platform designed for demanding Advanced Packaging, FEOL, and BEOL wet processes, including wet cleaning, wet etching, chemical reclaim, and multi chemistry applications.

Bringing multiple analyzers into a single platform, WetSpec+ delivers advanced process analysis and visibility across multiple process streams, with real time access to critical process parameters enabling faster process decisions.

Built for the demands of fab operation, WetSpec+ provides a stable environment for accurate, repeatable measurement while extending wet process coverage through dual analyzer configurations. Its compact, front access design brings advanced monitoring capabilities closer to the process, with convenient access for operation and service.

Broader coverage. Faster decisions. One integrated platform.