cyberTECHNOLOGIES GmbH

Ingolstadt,  Germany
https://www.cybertechnologies.com
  • Booth: 5638

ADVANCED METROLOGY SOLUTIONS for Fab & Lab

Overview

cyberTECHNOLOGIES develops and manufactures high-end metrology systems for the semiconductor industry.

Its systems are used worldwide by IDMs, foundries, and OSATs, supporting high-volume production and R&D with reliable nano-resolution, high-speed measurements across the process chain from front- to back-end.

The portfolio spans from tabletop systems for labs and process qualification to fully automated, multi-sensor platforms with integrated sample handling — engineered for high-accuracy, throughput, and nonstop operation in fabs.

cyberTECHNOLOGIES solutions support a wide range of applications, including:

  • Wafer Warp, Bow
  • Laser groove (e.g. Width, Chipping)
  • Thickness & Thickness Variation (TTV / LTV)
  • Thinfilm (down to 10 nm)
  • Step Heights
  • (µ-)Bumps, Pins, Pads & Pillars (e.g. Coplanarity, Position)
  • Critical Dimensions
  • Die Attach (e.g. Tilt)
  • Chiplets (e.g. Parallelism, Rotation)
  • Fillet Height
  • 3D Wirebond (e.g. Sway, Clearance)
  • Probecards (incl. Rework)
  • Thermal Warpage Measurement
  • Transparent Films & Coatings
  • Thickfilm
  • Roughness

…and many more.

See you at booth #1187!

www.cybertechnologies.com


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