Directly Technology Co., Ltd

Hsinchu,  Taiwan
https://www.directlytek.com/
  • Booth: 1043

Overview

Directly Technology Co., Ltd. provides advanced heating solutions for semiconductor manufacturing equipment. Its core products—Heating Jacket System, Gas Heating System (HN2), and Thermocouple assemblies—are engineered for vacuum and gas pipelines to maintain precise temperature control and prevent particle condensation. The Heating Jacket System integrates smart temperature controllers and interface boxes for real time centralized monitoring, extending pump and tool life while enhancing process reliability. The Gas Heating System delivers direct nitrogen heating inside pipelines or furnaces, minimizing by product formation and improving overall equipment efficiency.

  Press Releases

  • To support international semiconductor customers, Directly Technology now offers ISO/IEC 17025-certified thermocouple calibration services. The program ensures traceability to national standards and provides comprehensive temperature data for process optimization. This expansion strengthens the company’s global technical support network.

  • Smart Monitoring Interface Enhances Process Reliability
    Directly Technology introduces an upgraded HMI control system for heating jacket applications. The new interface allows individual PID zone monitoring and alarm management, improving process reliability and maintenance efficiency. The innovation demonstrates the company’s commitment to intelligent manufacturing and safety assurance.

  • ESG Energy-Saving Heating Solutions for Semiconductor Manufacturing

    Directly Technology Co., Ltd. announces its latest ESG-compliant heating solutions for semiconductor fabs, featuring the Heating Jacket System and Gas Heating System (HN2). These systems deliver precise temperature control and real-time monitoring, reducing energy consumption and extending equipment lifetime. The company continues to promote sustainable manufacturing through innovative thermal management technologies.

  Products

  • Heating Jacket System

    The Heating Jacket System is designed for temperature maintenance in vacuum and gas pipelines used in semiconductor manufacturing. It prevents powder condensation and ensures stable process conditions. The system includes heating jackets, temperature controllers, and interface control boxes, enabling real-time centralized monitoring of each zone. This solution extends pump and tool lifetime, improves preventive maintenance cycles, and supports ESG energy-saving goals through efficient thermal management.

    ...

  • Gas Heating System (HN2)

    The Gas Heating System (HN2) heats nitrogen or process gas directly in pipelines or furnaces. It maintains stable high temperatures to reduce by-product formation and improve equipment efficiency. The system can be customized with warning and monitoring functions and integrates flexibly with heating jacket systems. It is ideal for semiconductor process lines requiring precise gas temperature control.

    ...

  • Thermocouple

    Directly Technology offers high-precision thermocouples made in Japan, including R-type, Quartz, SiC, and SAPPHAL tubes. These sensors provide accurate temperature measurement for oxidation, diffusion, LPCVD, and anneal furnaces. Units can be supplied with ISO/IEC 17025 calibration certificates and comparison data against national standards. Configurations include outer, inner, profile, and spike thermocouples for comprehensive process monitoring.

    ...

Categories

203 Inspection & Measurement Products
  • Instruments; Bench Top Test
  • Leak Detection Systems - Vacuum or Gas
  • Metrology; Topology; Nanotopography; Flatness; Cryst.Orient.
  • Thermal Sensing, Measurement, Analysis
    • 207 Process Equipment
  • Deposition; (CVD, PVD, ALD, Plating)
  • Environmental Enclosures; Minienvironments
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Thermal Processing
    • 309 Test Materials
  • Boards: Burn-In; Performance (Low/High Temp and Ceramic)
  • Probe Cards; DUT boards and other probing accessories
  • Structural Circuits; Test; Thermal Fixturing
    • 400 Components, Parts & Accessories
  • Flow Control: Valves; Meters; Gauges; Regulators; MFC's
  • Heating elements and other Furnace components
  • Pipe; Tubing; Hose; Flanges; Connectors; Couplings; Fittings
  • Sensors
  • Vacuum Systems Components and Accessories
    • 500 Factory Monitoring & Control Systems (FMCS)
  • Data Collection; Building control systems
  • Environmental; Utility Systems & Monitoring
  • Gas Monitoring Equipment; RGA's; TGO compliance
  • Process Controls
    • 501 HVAC, Temperature, Humidity, Contamination Control
  • Clean Rooms
  • Contamination Control; HEPA Filtering Systems

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