Wafer Processing Furnaces, RTP/RTA Systems & E-Chucks (ESCs)
Overview
The ECM Group develops high-tech furnace systems for photovoltaic, energy storage, semiconductor, vacuum heat treatment & advanced crystal growth. Brands include:
ECM GREENTECH Three furnace ranges: silicon ingot casting installations using directional solidification for PV silicon ingots, high temp vacuum furnaces for heat treatment & semiconductor furnaces (diffusion, oxidation, doping,...) for wafer/cell processing (up to 300mm wafers)
ANNEALSYS (co-exhibitor) Rapid thermal processing & direct liquid systems
SEMCO (co-exhibitor) Electrostatic chucks (eChucks, ESCs) for wafer processing
FLOWLINK Complete range of gas components dedicated to the distribution of pure & corrosive gases (bellows valves and diaphragm valves, control valves, manifolds, check valves, filters & accessories). Value propositions customizable on request. 100% assembed in France
KEMSTREAM Direct Liquid Injection (DLI) vaporizers for CVD, MOCVD, PECVD, ALD, PEALD, ALE & all gas-phase processes. Vapbox DLI vaporizers capable of vaporizing broad spectrum of organic/organometallic precursors at atmospheric pressure or under vacuum