ECM Group

Grenoble,  France
https://ecmlabsolutions.com/
  • Booth: 1465

Wafer Processing Furnaces, RTP/RTA Systems & E-Chucks (ESCs)

Overview

The ECM Group develops high-tech furnace systems for photovoltaic, energy storage, semiconductor, vacuum heat treatment & advanced crystal growth. Brands include: ECM GREENTECH // High temp vacuum furnaces for heat treatment & semiconductor lab furnaces (diffusion, oxidation, doping,...) for wafer/cell processing (up to 300mm wafers) [ecm-greentech.com[ ANNEALSYS // Rapid thermal processing & direct liquid systems [www.annealsys.com] SEMCO // Electrostatic chucks (eChucks, ESCs) for wafer processing [semco-tech.com] FLOWLINK // Complete range of gas components dedicated to the distribution of pure & corrosive gases (bellows valves and diaphragm valves, control valves, manifolds, check valves, filters & accessories) [flowlinksa.com] KEMSTREAM // Direct Liquid Injection (DLI) vaporizers for CVD, MOCVD, PECVD, ALD, PEALD, ALE & all gas-phase processes. [kemstream.com]

  Products

  • Semiconductor Wafer Processing Furnaces

    ECM GREENTECH [ecm-greentech.com] 

    Vertical & Horizontal multi-wafer processing systems (4”, 6”, 8” and 12” wafers) for diffusion, oxidation, doping, and other processes in wafer and cell manufacturing

    ANNEALSYS [annealsys.com]

    Rapid Thermal Processing (RTP/RTA and RTCVD) and Direct Liquid Injection Deposition (CVD and ALD) systems for the manufacturing of MEMS, sensors, opto-electronics, telecommunication, power and discrete devices.

    ...

  • Electrostatic Chucks (ESCs)

    Semco Electrostatic Chucks are plug & play, available in multi polarities, reworkable, and have an excellent thermal transfer under vacuum. Semco's patented ESC technology provides long lifetime with high reliability.  Additionally, our ESCs work in temperature range from -150°C up to 650°C, and can include embedded heaters up to 550°C.

    ...

  • Semiconductor Manufacturing Components: Gas Panels & DLI Vaporizers

    FLOWLINK: Components, gas valves, and gas panels for handling ultra high purity (UHP) or corrosive gases [flowlinksa.com]

    KEMSTREAM: Innovative and advanced Direct Liquid Injection (DLI) vaporizers and atomizers for CVD, MOCVD, MOVPE, ALD, spray pyrolysis and all gas phase processes and precursors [kemstream.com]

    ...

Categories

101 Photovoltaic Device Manufacturing
  • PV-Building-Integrated Solutions
  • PV: Cells
  • PV: Stand-Alone Systems
    • 200 Packaging and Assembly Equipment
  • Solder Reflow; Soldering & Brazing Equipment
    • 205 Nanotechnology Equipment and Tools
  • Equipment, Nanotechnology Tools
    • 206 PV Equipment
  • Cells
  • Thin Film
  • Wafers
    • 207 Process Equipment
  • Crystal Growing & Machining Equipment
  • Deposition; (CVD, PVD, ALD, Plating)
  • Epitaxy Equipment
  • Thermal Processing
    • 402 PV Systems
  • Stand-Alone Systems
    • 900 Support Products
  • Laboratory Apparatus and Supplies

    • Send Email

    Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".

    Loading ...

    :
    :


    Legend
    Available Timeslot
    Scheduled Appointment
    Personal Appointments
    Appointment Request
    Blocked Timeslot
    Restricted Timeslot
    Cancelled
    Declined