Levitronix Technologies, Inc.

Framingham,  MA 
United States
http://www.levitronix.com
  • Booth: 1653

Better Products for Better Yield!

Overview

Levitronix® markets pumps, flowmeters, flow control systems, mixers, viscometers and fans to the Semiconductor Industry. Levitronix® products use a revolutionary magnetic levitation technology, which allows for contact-free, and thus, particle-free operation. With no mechanical wear, Levitronix® pumps are ideal for CMP slurry handling, metal plating processes, wet cleaning and etching, and high purity fluid transfer and delivery. Levitronix® pumps deliver continuous flow allowing for precise electronic control of flow and pressure. The pump systems are designed for high-purity fluid applications where extremely low particle shedding and metal contamination are required.

  Products

  • Levitronix® BFS Chemically Resistant MagLev Fans

    The Levitronix® Bearingless Fan System BFS is designed for demanding applications in microelectronics manufacturing. Based on active magnetic levitation, the fan impeller is suspended and driven by the magnetic field of the motor. The wide gap between impeller and stator ensures that there is no wear and therefore virtually no particle generation, making it the purest fan. As the impeller and stator are completely encapsulated, the fan is extremely resistant against aggressive media and is rated for use in explosive atmospheres.

    ...

  • Levitronix® LFS Ultrasonic High-Precision Flow Measurement for Microelectr

    The LEVIFLOW® LFS inline sensor is designed for non-invasive high precision flow measurements of high purity fluids. Two piezoelectric transducers generate and receive ultrasonic waves. When flow is present, the with-stream wave is accelerated, and the against-stream wave is slowed down. The difference in transit time is proportional to the velocity of the fluid. The wet material is made from PFA and resistant against harshest chemicals.

    ...

Categories

207 Process Equipment
  • Chemical Mechanical Polishing
  • Coat; Develop; Resist Processing; Track Equipment
  • Deposition; (CVD, PVD, ALD, Plating)
  • Deposition; PVD; Sputtering; Evaporation Equipment
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Lithography/Exposure
  • Plating; Electro Chemical Plating; Deposition Systems
  • Spin on Glass (SOG); on Dielectric (SOD) Track systems
    • 400 Components, Parts & Accessories
  • Flow Control: Valves; Meters; Gauges; Regulators; MFC's
  • Motors; Fans; Electric Rotary Spindles
  • Sensors
    • 401 Sub-systems
  • Process Monitoring systems
  • Pumps, for Fluids
  • Ultrasonic Generators; Transducer and Monitoring Systems
    • 500 Factory Monitoring & Control Systems (FMCS)
  • Chemical; Pure Water; Fluid Handling; Storage; Supply Sys.
  • Chemical; Pure Water; Fluid Monitoring & Control Systems
  • Process Controls

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