ASUZAC Inc.

Kamitakai-gun,  Nagano 
Japan
http://www.asuzac-ceramics.jp
  • Booth: 6768

Overview

At ASUZAC Inc. Fine Ceramics, we manufacture fine ceramic components for semiconductor manufacturing equipment. Using our proprietary material and processing technologies, we develop and produce various mechanical components including wafer transfer hands, chucks, and large ceramics for FPD and PLP. We offer custom, made-to-order designs to meet each customer's requirements.

  Press Releases

  • Utilize Asuzac's orginal SiC surface treatment technology for low particle, highly clean SiC parts. 

    SiC's inherent high durability as well as chemical and heat resistance can contribute to less part replacement and overall lower running costs.

    067f1a8a0289974703684be98d7e8bc3-huge-sc-annealing.png

    For further inquiries, please visitu us at our booth at Semicon West 2026, or contact us through our website using the “Buy Now” link below.

  • Solve ESD issues during processes through Asuzac's original static dissipative Al2O3 coatings. 

    Both the ceramic base and coating are made of Alumina, making parts highly durable and heat resistant, as well as the added benefit of reduced particles after coating. The coating comes in two varieties, the clear ADC coating and the black ADB coating, each having ideal surface resistivity for static dissipation. 

    ef82fdd9fffbce33d98eae4bd6b3b629-huge-adb-coating1.png

    For further inquiries, please visit us at our booth at Semicon West 2026, or contact us through our website using the “Buy Now” link below.

  Products

  • Sensor Equipped Wafer Transfer Ceramic End Effectors

    Equip wafer transfer ceramic end effectors with various kinds of sensors for improved process control and insight. Installation locations are highly customizable through Asuzac's precision machining capabilities and non-adhesive, single-piece hollow channel ceramics. 

    Example sensor/device types:

    • Temperature sensor
    • Load sensor
    • LEDs

    For further inquiries, please visit us at our booth at Semicon West 2026 or contact us through our website using the “Buy Now” link below.

    ...

  • Porous Ceramic Heater Chuck

    Combining Asuzac's porous ceramic chucks with an installed heater, Asuzac's porous ceramic heater chuck offers stable suction while also providing a solution to misalignment issues due to thermal expansion. The porous ceramic provides full surface suction as well as partial suction to accommodate workpieces of multiple sizes with just one chuck.

    Design is customizable including ESD coating options.

    For further inquiries, please visit us at our booth at Semicon West 2026 or contact us through our website using the “Buy Now” link below.

    ...

  • Ceramic Air Bearing Slider

    Asuzac's Air Bearing Ceramic Slider offers high rigidity and low friction transport for superior precision and reduced particle generation compared to metal sliders.  

    *Custom configurations available to suit your size, load, and accuracy requirements.

    248eebf4065bb7218a41d8b8b50b5cbe-huge-slider-details.png

    For further inquiries, please visit us at our booth at Semicon West 2026 or contact us through our website using the “Buy Now” link below.

    ...

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