Azbil North America, Inc

Phoenix,  AZ 
United States
https://us.azbil.com/
  • Booth: 5786

Overview

Serving the semiconductor industry, Azbil delivers solutions that enable stable and precise process operation, reduced maintenance, and improved equipment performance in challenging environments such as high-temperature and deposition processes, including ALD, CVD, etching, CMP, and wet process applications. Our semiconductor portfolio includes temperature control systems, vacuum gauges (capacitance diaphragm gauges), gas mass flow controllers and meters, liquid flow meters, liquid leak detection sensors, and thermal cameras for non-contact temperature monitoring. Azbil Corporation is a global provider of sensing and control technologies with over 120 years of experience in measurement and automation. In 2006, Yamatake Group formulated its new group philosophy and brand symbol of “azbil“, reflecting our commitment to realize safety, comfort and fulfillment in people’s lives and contribute to the global environment through “human-centered automation,” engineering the impossible.


  Products

  • Vacuum Measurement for ALD and High-Temperature Gas Delivery

    Designed for advanced deposition and gas delivery applications, the V8 Series enables accurate vacuum measurement in high-temperature environments where process control is increasingly critical. Its compact form factor helps equipment builders maximize valuable installation space while supporting next-generation semiconductor process requirements. From advanced ALD systems to high-temperature gas delivery modules, the V8 Series provides the performance needed for fast process cycles, stable operation, and reliable pressure measurement.

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  • Thermal Uniformity for Advanced Semiconductor Manufacturing

    As semiconductor manufacturing continues to demand tighter process windows, temperature stability and thermal uniformity have become critical factors in achieving consistent production performance.

     

    Azbil's thermal monitoring and control solutions help equipment manufacturers improve wafer-to-wafer and chamber-to-chamber consistency through precise temperature measurement and advanced control technologies. By maintaining tighter thermal profiles throughout the process, manufacturers can improve process repeatability, support yield improvement initiatives, and reduce process variation across production tools.

     

    The solution is designed for demanding thermal applications including electrostatic chuck control, chamber temperature management, plasma processes, deposition systems, and other critical semiconductor manufacturing processes. In addition to improving thermal stability, optimized temperature management can help reduce unnecessary energy consumption and support more efficient equipment operation while maintaining process performance. Advanced sensing technologies enable accurate and repeatable temperature measurement even in environments where conventional sensing methods face limitations.

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