The ARC maglev-pump system is a revolutionary centrifugal pump that has no bearings to wear out or seals to break down and fail. Based on the principles of magnetic levitation, the pump’s impeller is suspended, contact-free, inside a sealed casing and is driven by the magnetic field of the motor. The impeller and casing are both fabricated from chemical-resistant high purity fluorocarbon resins. Together with the rotor magnet they make up the pump head. Fluid flow rate and pressure are precisely controlled by electronically regulating the impeller speed without pulsation. Closed loop flow or pressure control is easy configurable with the usage of an additional pressure or flow sensor.
ARC系列磁悬浮泵系统是一种革命性的离心泵，它没有轴承磨损或密封件故障。根据磁悬浮原理，泵的叶轮无接触地悬浮在密封外壳内，由电机磁场驱动旋转。叶轮和壳体均由耐化学腐蚀的高纯度氟树脂制成。它们与转子磁铁一起构成泵头。流体流量和压力可以通过电子调速器连续调节叶轮速度进行精确控制确保没有脉动。通过使用额外的压力或流量传感器，可以轻松配置闭环流量或压力控制。随着技术和应用的成熟，磁悬浮泵已经被广泛用于半导体制造的多个过程，例如电子化学液体输送、光化学处理、硅片刻蚀、硅片清洗、金属镀层和CMP药液输送等场景。