※ Type: Canisters for solid precursor materials
※ Specification: 1L, 1.2L, 1.8L, 5L, 8L ,10L etc.
※ Material : Valve : 316L EP ;
Bottle: 316L ( TA1\TA2 , Hastelloy ) , internal EP, Ra ≤ 0.15μm
※ Medium: ALCl3, HfCl4, ZrCl4 etc.
※ Purity: 99.999---99.999999%
※Gas tightness test : ≤1.0×10 -10 mbar.L/S ( Also refer to valve leakage rate )
※ Optional tests : Pressure, helium leak, moisture, particles, oxygen test
※ Optional accredition :
UN 、 Pressure Vessels and ASME UM/ U
※ Optional services :
Joints type, valves, output and cleaning process, etc.